JPS5539625B2 - - Google Patents

Info

Publication number
JPS5539625B2
JPS5539625B2 JP2683073A JP2683073A JPS5539625B2 JP S5539625 B2 JPS5539625 B2 JP S5539625B2 JP 2683073 A JP2683073 A JP 2683073A JP 2683073 A JP2683073 A JP 2683073A JP S5539625 B2 JPS5539625 B2 JP S5539625B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2683073A
Other languages
Japanese (ja)
Other versions
JPS49115085A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2683073A priority Critical patent/JPS5539625B2/ja
Publication of JPS49115085A publication Critical patent/JPS49115085A/ja
Publication of JPS5539625B2 publication Critical patent/JPS5539625B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2683073A 1973-03-07 1973-03-07 Expired JPS5539625B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2683073A JPS5539625B2 (de) 1973-03-07 1973-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2683073A JPS5539625B2 (de) 1973-03-07 1973-03-07

Publications (2)

Publication Number Publication Date
JPS49115085A JPS49115085A (de) 1974-11-02
JPS5539625B2 true JPS5539625B2 (de) 1980-10-13

Family

ID=12204175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2683073A Expired JPS5539625B2 (de) 1973-03-07 1973-03-07

Country Status (1)

Country Link
JP (1) JPS5539625B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295089A (ja) * 1989-05-06 1990-12-05 Minematsu Denki Seisakusho:Kk 電熱器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414160U (de) * 1987-07-17 1989-01-25
JP2836072B2 (ja) * 1988-05-30 1998-12-14 株式会社島津製作所 スパッタリング装置
CN1258616C (zh) 2001-02-07 2006-06-07 旭硝子株式会社 溅射装置及溅射成膜方法
US7749622B2 (en) 2002-10-22 2010-07-06 Asahi Glass Company, Limited Multilayer film-coated substrate and process for its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295089A (ja) * 1989-05-06 1990-12-05 Minematsu Denki Seisakusho:Kk 電熱器

Also Published As

Publication number Publication date
JPS49115085A (de) 1974-11-02

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