JPS5539902B2 - - Google Patents

Info

Publication number: JPS5539902B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP113174A

Other languages

Japanese (ja)

Other versions

JPS5099685A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-12-29

Filing date

1973-12-29

Publication date

1980-10-14

1973-12-29 Application filed filed Critical

1973-12-29 Priority to JP113174A priority Critical patent/JPS5539902B2/ja

1975-08-07 Publication of JPS5099685A publication Critical patent/JPS5099685A/ja

1980-10-14 Publication of JPS5539902B2 publication Critical patent/JPS5539902B2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Weting (AREA)
Mechanical Treatment Of Semiconductor (AREA)

JP113174A 1973-12-29 1973-12-29 Expired JPS5539902B2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP113174A JPS5539902B2 (en)	1973-12-29	1973-12-29

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP113174A JPS5539902B2 (en)	1973-12-29	1973-12-29

Publications (2)

Publication Number	Publication Date
JPS5099685A JPS5099685A (en)	1975-08-07
JPS5539902B2 true JPS5539902B2 (en)	1980-10-14

Family

ID=11492877

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP113174A Expired JPS5539902B2 (en)	1973-12-29	1973-12-29

Country Status (1)

Country	Link
JP (1)	JPS5539902B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57502256A (en) *	1981-01-05	1982-12-23

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5935429A (en) *	1982-08-12	1984-02-27	インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン	Method of producing semiconductor wafer
US4944836A (en) *	1985-10-28	1990-07-31	International Business Machines Corporation	Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
NL8700033A (en) *	1987-01-09	1988-08-01	Philips Nv	METHOD FOR MANUFACTURING A SEMICONDUCTOR SEMICONDUCTOR TYPE ON ISOLATOR
JP2643262B2 (en) *	1988-03-23	1997-08-20	日本電気株式会社	Method for manufacturing semiconductor device
JP6411759B2 (en) *	2014-03-27	2018-10-24	株式会社フジミインコーポレーテッド	Polishing composition, method for using the same, and method for producing a substrate

1973
- 1973-12-29 JP JP113174A patent/JPS5539902B2/ja not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57502256A (en) *	1981-01-05	1982-12-23

Also Published As

Publication number	Publication date
JPS5099685A (en)	1975-08-07

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