JPS5540761U - - Google Patents

Info

Publication number
JPS5540761U
JPS5540761U JP12501478U JP12501478U JPS5540761U JP S5540761 U JPS5540761 U JP S5540761U JP 12501478 U JP12501478 U JP 12501478U JP 12501478 U JP12501478 U JP 12501478U JP S5540761 U JPS5540761 U JP S5540761U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12501478U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12501478U priority Critical patent/JPS5540761U/ja
Publication of JPS5540761U publication Critical patent/JPS5540761U/ja
Pending legal-status Critical Current

Links

JP12501478U 1978-09-11 1978-09-11 Pending JPS5540761U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12501478U JPS5540761U (en) 1978-09-11 1978-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12501478U JPS5540761U (en) 1978-09-11 1978-09-11

Publications (1)

Publication Number Publication Date
JPS5540761U true JPS5540761U (en) 1980-03-15

Family

ID=29085540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12501478U Pending JPS5540761U (en) 1978-09-11 1978-09-11

Country Status (1)

Country Link
JP (1) JPS5540761U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63243285A (en) * 1987-03-31 1988-10-11 Ulvac Corp Rotating electrode type magnetron etching device
JPS63243286A (en) * 1987-03-31 1988-10-11 Ulvac Corp Rotating magnetic field type magnetron etching device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63243285A (en) * 1987-03-31 1988-10-11 Ulvac Corp Rotating electrode type magnetron etching device
JPS63243286A (en) * 1987-03-31 1988-10-11 Ulvac Corp Rotating magnetic field type magnetron etching device

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