JPS55411A - Surface roughness measurement with laser beam - Google Patents

Surface roughness measurement with laser beam

Info

Publication number
JPS55411A
JPS55411A JP4412778A JP4412778A JPS55411A JP S55411 A JPS55411 A JP S55411A JP 4412778 A JP4412778 A JP 4412778A JP 4412778 A JP4412778 A JP 4412778A JP S55411 A JPS55411 A JP S55411A
Authority
JP
Japan
Prior art keywords
surface roughness
scattered
sample
fourier transforming
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4412778A
Other languages
Japanese (ja)
Inventor
Toshio Horiuchi
Kanmeru Rorando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP4412778A priority Critical patent/JPS55411A/en
Publication of JPS55411A publication Critical patent/JPS55411A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To obtain the stable measurement results by determining the surface roughness with the use of a calibration curve from the optical intensity at the origin of a spacial frequency axis on the Fourier transforming plane of a scattered light.
CONSTITUTION: The beam from a laser light source 1 is changed into a parallel beam by a lens 3 to enter a transparent replica 4, which is taken out of a sample surface, so that it is scattered by the irregular surface roughness thereof. After that, the scattered beam is focused on a Fourier transforming plane a by a Fourier transforming lens 5. since there is arranged at the origin of the spacial frequency axis of the plane a a phototransistor 6 which has a minute light receiving surface, the scattered beam of the replica 4 illuminates this so that it has an output corresponding to the illumination. As a result, if the relationship between the output of the transistor 6 and the surface roughness is calibrated in advance with the use of a sample having a known surface roughness, the stable measurement results of the surface roughness can be determined from the output of the transistor 6. Incidentally, the transparent replica can be replaced by a split which has an inclination of about 45 degrees with respect to the parallel beam from the reflective rough sample.
COPYRIGHT: (C)1980,JPO&Japio
JP4412778A 1978-04-17 1978-04-17 Surface roughness measurement with laser beam Pending JPS55411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4412778A JPS55411A (en) 1978-04-17 1978-04-17 Surface roughness measurement with laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4412778A JPS55411A (en) 1978-04-17 1978-04-17 Surface roughness measurement with laser beam

Publications (1)

Publication Number Publication Date
JPS55411A true JPS55411A (en) 1980-01-05

Family

ID=12682937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4412778A Pending JPS55411A (en) 1978-04-17 1978-04-17 Surface roughness measurement with laser beam

Country Status (1)

Country Link
JP (1) JPS55411A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61113002U (en) * 1984-12-28 1986-07-17
JP2007007122A (en) * 2005-06-30 2007-01-18 Japan Pionics Co Ltd Sheet heating element for bedding, mat and bed using the same
JP2009198340A (en) * 2008-02-22 2009-09-03 Hitachi High-Technologies Corp Electron microscope system, and film thickness reduction amount evaluation method of resist pattern using it

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61113002U (en) * 1984-12-28 1986-07-17
JP2007007122A (en) * 2005-06-30 2007-01-18 Japan Pionics Co Ltd Sheet heating element for bedding, mat and bed using the same
JP2009198340A (en) * 2008-02-22 2009-09-03 Hitachi High-Technologies Corp Electron microscope system, and film thickness reduction amount evaluation method of resist pattern using it

Similar Documents

Publication Publication Date Title
WO1998052025A1 (en) Surface inspection instrument and surface inspection method
ES8402931A1 (en) Optical inspection system
CA2330793A1 (en) Container sealing surface area inspection
BR9303415A (en) APPLIANCE FOR THE MEASUREMENT OF WALL THICKNESS OF CONTAINERS AND THE PROCESS OF MEASUREMENT OF THICKNESS OF THE SIDE WALL OF A CONTAINER
JPS55411A (en) Surface roughness measurement with laser beam
JPS5749805A (en) Measuring device for roughness of surface
JPS57186106A (en) Inspection device for surface
JPS57148233A (en) Testing method and device for hardness
JPS5667815A (en) Optical scanner
JPS56153207A (en) Measuring device for film thickness
JPS5752807A (en) Device for measuring film thickness
JPS5690227A (en) Optical fiber temperature detector
JPS57172254A (en) Speed measuring device
JPS56130606A (en) Optical measuring device for thickness of transparent material
JPS5471652A (en) Automatic dimmer for microscope light source
JPS5483885A (en) Surface inspector
KR910013633A (en) Real-time monitoring of the interaction state between the laser and the workpiece in the laser processing machine
JPS5544926A (en) Article surface fault detector
JPS6413405A (en) Surface shape measuring instrument
JPS57161607A (en) Measuring device for object size
JPS5629146A (en) Photometric sensor of immersion type
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS57135306A (en) Measuring method of microsubstance
JPS5320949A (en) Measuring device for diameter of light beam path
JPS6410131A (en) Spectroscope apparatus