JPS5541828B2 - - Google Patents
Info
- Publication number
- JPS5541828B2 JPS5541828B2 JP6426074A JP6426074A JPS5541828B2 JP S5541828 B2 JPS5541828 B2 JP S5541828B2 JP 6426074 A JP6426074 A JP 6426074A JP 6426074 A JP6426074 A JP 6426074A JP S5541828 B2 JPS5541828 B2 JP S5541828B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Ventilation (AREA)
- Prevention Of Fouling (AREA)
- Air Transport Of Granular Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6426074A JPS5541828B2 (fr) | 1974-06-06 | 1974-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6426074A JPS5541828B2 (fr) | 1974-06-06 | 1974-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50156067A JPS50156067A (fr) | 1975-12-16 |
| JPS5541828B2 true JPS5541828B2 (fr) | 1980-10-27 |
Family
ID=13253031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6426074A Expired JPS5541828B2 (fr) | 1974-06-06 | 1974-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5541828B2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62502364A (ja) * | 1985-10-25 | 1987-09-10 | エム アンド テイ ケミカルズ インコ−ポレ−テツド | プリント基板への光マスク位置合せ装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52100668A (en) * | 1976-02-18 | 1977-08-23 | Ishikawajima Harima Heavy Ind Co Ltd | Suction device |
| JP6694633B2 (ja) * | 2016-06-22 | 2020-05-20 | 国立大学法人 名古屋工業大学 | 吸引装置および駆動装置 |
-
1974
- 1974-06-06 JP JP6426074A patent/JPS5541828B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62502364A (ja) * | 1985-10-25 | 1987-09-10 | エム アンド テイ ケミカルズ インコ−ポレ−テツド | プリント基板への光マスク位置合せ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50156067A (fr) | 1975-12-16 |