JPS5542376B2 - - Google Patents

Info

Publication number
JPS5542376B2
JPS5542376B2 JP2372171A JP2372171A JPS5542376B2 JP S5542376 B2 JPS5542376 B2 JP S5542376B2 JP 2372171 A JP2372171 A JP 2372171A JP 2372171 A JP2372171 A JP 2372171A JP S5542376 B2 JPS5542376 B2 JP S5542376B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2372171A
Other languages
Japanese (ja)
Other versions
JPS4845186A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2372171A priority Critical patent/JPS5542376B2/ja
Publication of JPS4845186A publication Critical patent/JPS4845186A/ja
Publication of JPS5542376B2 publication Critical patent/JPS5542376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Light Receiving Elements (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP2372171A 1971-04-13 1971-04-13 Expired JPS5542376B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2372171A JPS5542376B2 (de) 1971-04-13 1971-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2372171A JPS5542376B2 (de) 1971-04-13 1971-04-13

Publications (2)

Publication Number Publication Date
JPS4845186A JPS4845186A (de) 1973-06-28
JPS5542376B2 true JPS5542376B2 (de) 1980-10-30

Family

ID=12118180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2372171A Expired JPS5542376B2 (de) 1971-04-13 1971-04-13

Country Status (1)

Country Link
JP (1) JPS5542376B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105452957A (zh) * 2013-08-06 2016-03-30 ams有限公司 制作具有底切侧壁的抗蚀剂结构的方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOVIET PHISICS-SOLID STOTE#V8#N2=1966 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105452957A (zh) * 2013-08-06 2016-03-30 ams有限公司 制作具有底切侧壁的抗蚀剂结构的方法
CN105452957B (zh) * 2013-08-06 2019-12-10 ams有限公司 制作具有底切侧壁的抗蚀剂结构的方法

Also Published As

Publication number Publication date
JPS4845186A (de) 1973-06-28

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