JPS5547450B2 - - Google Patents
Info
- Publication number
- JPS5547450B2 JPS5547450B2 JP1390073A JP1390073A JPS5547450B2 JP S5547450 B2 JPS5547450 B2 JP S5547450B2 JP 1390073 A JP1390073 A JP 1390073A JP 1390073 A JP1390073 A JP 1390073A JP S5547450 B2 JPS5547450 B2 JP S5547450B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1390073A JPS5547450B2 (fr) | 1973-02-03 | 1973-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1390073A JPS5547450B2 (fr) | 1973-02-03 | 1973-02-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49103568A JPS49103568A (fr) | 1974-10-01 |
| JPS5547450B2 true JPS5547450B2 (fr) | 1980-11-29 |
Family
ID=11846029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1390073A Expired JPS5547450B2 (fr) | 1973-02-03 | 1973-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547450B2 (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59223295A (ja) * | 1983-05-27 | 1984-12-15 | Toshiba Corp | 化合物半導体製造方法 |
| JP2008087991A (ja) * | 2006-09-29 | 2008-04-17 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | ドーパントガスの注入方法 |
| JP6569485B2 (ja) * | 2015-11-09 | 2019-09-04 | 株式会社Sumco | 原料のリチャージ又は単結晶引上げに用いられる蓋付容器 |
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1973
- 1973-02-03 JP JP1390073A patent/JPS5547450B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49103568A (fr) | 1974-10-01 |