JPS555585B2 - - Google Patents
Info
- Publication number
- JPS555585B2 JPS555585B2 JP2166775A JP2166775A JPS555585B2 JP S555585 B2 JPS555585 B2 JP S555585B2 JP 2166775 A JP2166775 A JP 2166775A JP 2166775 A JP2166775 A JP 2166775A JP S555585 B2 JPS555585 B2 JP S555585B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2166775A JPS555585B2 (2) | 1975-02-21 | 1975-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2166775A JPS555585B2 (2) | 1975-02-21 | 1975-02-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5196787A JPS5196787A (2) | 1976-08-25 |
| JPS555585B2 true JPS555585B2 (2) | 1980-02-07 |
Family
ID=12061380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2166775A Expired JPS555585B2 (2) | 1975-02-21 | 1975-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS555585B2 (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928033Y2 (ja) * | 1977-08-19 | 1984-08-14 | 松下電器産業株式会社 | スパツタリング装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS494200A (2) * | 1972-05-06 | 1974-01-14 |
-
1975
- 1975-02-21 JP JP2166775A patent/JPS555585B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5196787A (2) | 1976-08-25 |