JPS5557247A - Electron-ray deflecting apparatus for scan-type electron microscope - Google Patents

Electron-ray deflecting apparatus for scan-type electron microscope

Info

Publication number
JPS5557247A
JPS5557247A JP13025178A JP13025178A JPS5557247A JP S5557247 A JPS5557247 A JP S5557247A JP 13025178 A JP13025178 A JP 13025178A JP 13025178 A JP13025178 A JP 13025178A JP S5557247 A JPS5557247 A JP S5557247A
Authority
JP
Japan
Prior art keywords
multiplying factor
magnetism
extinguishing
electron
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13025178A
Other languages
Japanese (ja)
Other versions
JPS593021B2 (en
Inventor
Shuichi Saito
Susumu Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53130251A priority Critical patent/JPS593021B2/en
Publication of JPS5557247A publication Critical patent/JPS5557247A/en
Publication of JPS593021B2 publication Critical patent/JPS593021B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To eliminate the influence to high multiplying factor scanned image due to hysteresis by arranging a scanning power source for feeding saw-tooth scan deflection current to electron ray deflecting coil and a magnetism extinguishing power source for feeding a constant magnetism extinguishing current.
CONSTITUTION: The electric current which is supplied to Y- and X-direction deflecting coils 3 and 4 which are wound on the ring-shaped ferrite cores 1 and 2 respectively having the electron-ray passage along optical axis Z as the center axis is controlled. In normal state, each saw-tooth wave current generated from the output of horizontal and vertical direction scanning power sources 5 and 6 mutually synchronized is used as multiplying factor adjusting means, and supplied in mutual linkage to the coils 3 and 4 through variable amplifiers 7X and 7Y and switching circuits 8 and 9. The multiplying factor varying operation is detected by the amplifier 7Y, and a magnetism extinguishing control circuit 10 which is operated by said signal is arranged, and when multiplying factor switching operation is performed, control signal is applied to a magnetism extinguishing power source 11 and the switching circuits 8 and 9, and blanking signal is applied to brightness modulation input. Thus, the effect of hysteresis in high multiplying factor can be eliminated.
COPYRIGHT: (C)1980,JPO&Japio
JP53130251A 1978-10-23 1978-10-23 Electron beam deflection device for scanning electron microscopes, etc. Expired JPS593021B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53130251A JPS593021B2 (en) 1978-10-23 1978-10-23 Electron beam deflection device for scanning electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53130251A JPS593021B2 (en) 1978-10-23 1978-10-23 Electron beam deflection device for scanning electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5557247A true JPS5557247A (en) 1980-04-26
JPS593021B2 JPS593021B2 (en) 1984-01-21

Family

ID=15029764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53130251A Expired JPS593021B2 (en) 1978-10-23 1978-10-23 Electron beam deflection device for scanning electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS593021B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211570A (en) * 1983-05-16 1984-11-30 Jeol Ltd Film formation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211570A (en) * 1983-05-16 1984-11-30 Jeol Ltd Film formation

Also Published As

Publication number Publication date
JPS593021B2 (en) 1984-01-21

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