JPS5557247A - Electron-ray deflecting apparatus for scan-type electron microscope - Google Patents
Electron-ray deflecting apparatus for scan-type electron microscopeInfo
- Publication number
- JPS5557247A JPS5557247A JP13025178A JP13025178A JPS5557247A JP S5557247 A JPS5557247 A JP S5557247A JP 13025178 A JP13025178 A JP 13025178A JP 13025178 A JP13025178 A JP 13025178A JP S5557247 A JPS5557247 A JP S5557247A
- Authority
- JP
- Japan
- Prior art keywords
- multiplying factor
- magnetism
- extinguishing
- electron
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To eliminate the influence to high multiplying factor scanned image due to hysteresis by arranging a scanning power source for feeding saw-tooth scan deflection current to electron ray deflecting coil and a magnetism extinguishing power source for feeding a constant magnetism extinguishing current.
CONSTITUTION: The electric current which is supplied to Y- and X-direction deflecting coils 3 and 4 which are wound on the ring-shaped ferrite cores 1 and 2 respectively having the electron-ray passage along optical axis Z as the center axis is controlled. In normal state, each saw-tooth wave current generated from the output of horizontal and vertical direction scanning power sources 5 and 6 mutually synchronized is used as multiplying factor adjusting means, and supplied in mutual linkage to the coils 3 and 4 through variable amplifiers 7X and 7Y and switching circuits 8 and 9. The multiplying factor varying operation is detected by the amplifier 7Y, and a magnetism extinguishing control circuit 10 which is operated by said signal is arranged, and when multiplying factor switching operation is performed, control signal is applied to a magnetism extinguishing power source 11 and the switching circuits 8 and 9, and blanking signal is applied to brightness modulation input. Thus, the effect of hysteresis in high multiplying factor can be eliminated.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53130251A JPS593021B2 (en) | 1978-10-23 | 1978-10-23 | Electron beam deflection device for scanning electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53130251A JPS593021B2 (en) | 1978-10-23 | 1978-10-23 | Electron beam deflection device for scanning electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5557247A true JPS5557247A (en) | 1980-04-26 |
| JPS593021B2 JPS593021B2 (en) | 1984-01-21 |
Family
ID=15029764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53130251A Expired JPS593021B2 (en) | 1978-10-23 | 1978-10-23 | Electron beam deflection device for scanning electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593021B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211570A (en) * | 1983-05-16 | 1984-11-30 | Jeol Ltd | Film formation |
-
1978
- 1978-10-23 JP JP53130251A patent/JPS593021B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59211570A (en) * | 1983-05-16 | 1984-11-30 | Jeol Ltd | Film formation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS593021B2 (en) | 1984-01-21 |
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