JPS5560807A - Measuring instrument for film - Google Patents

Measuring instrument for film

Info

Publication number
JPS5560807A
JPS5560807A JP13475578A JP13475578A JPS5560807A JP S5560807 A JPS5560807 A JP S5560807A JP 13475578 A JP13475578 A JP 13475578A JP 13475578 A JP13475578 A JP 13475578A JP S5560807 A JPS5560807 A JP S5560807A
Authority
JP
Japan
Prior art keywords
thickness
film
photo detector
output
evaporating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13475578A
Other languages
Japanese (ja)
Inventor
Takao Sashita
Masao Umetsu
Yoshinobu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP13475578A priority Critical patent/JPS5560807A/en
Publication of JPS5560807A publication Critical patent/JPS5560807A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To provide a small evaporator which is capable of easily measuring the thickness of an evaporated film and of saving electric power consumed by using an evaporator as a light projector, receiving light at a photo detector through a base plate and measuring the thickness of a film.
CONSTITUTION: The evaporating source 2 is served as a light projector. When it is heated by a heater, etc., energy is radiated in proportion to the fourth power of temperature, this output energy becomes constant in a given hour and therefore the temperature of the evaporating source 2 becomes nearly constant, too. Under this condition a shutter 6 is opened and the evaporation is started. The relation between the thickness of the evaporated film 7 on the base plate 3 and the output of the the photo detector 5 varies with the variaties of evaporating films such as dielectrics A, semiconductors B, metals C. Therefore, if the film thickness is measured monitoring the output of the photo detector 5 after the start of evaporation, the film can be controlled to have a desired thickness. If the evaporating source is served as a light projection source, the thickness of an evaporated film can be measured easily in a small evaporator.
COPYRIGHT: (C)1980,JPO&Japio
JP13475578A 1978-11-01 1978-11-01 Measuring instrument for film Pending JPS5560807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13475578A JPS5560807A (en) 1978-11-01 1978-11-01 Measuring instrument for film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13475578A JPS5560807A (en) 1978-11-01 1978-11-01 Measuring instrument for film

Publications (1)

Publication Number Publication Date
JPS5560807A true JPS5560807A (en) 1980-05-08

Family

ID=15135797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13475578A Pending JPS5560807A (en) 1978-11-01 1978-11-01 Measuring instrument for film

Country Status (1)

Country Link
JP (1) JPS5560807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584886A (en) * 1983-09-26 1986-04-29 Kabushiki Kaisha Toshiba Resolution device for semiconductor thin films

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494068A (en) * 1978-01-07 1979-07-25 Victor Co Of Japan Ltd Film thickness metering and monitoring method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494068A (en) * 1978-01-07 1979-07-25 Victor Co Of Japan Ltd Film thickness metering and monitoring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584886A (en) * 1983-09-26 1986-04-29 Kabushiki Kaisha Toshiba Resolution device for semiconductor thin films

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