JPS5567149A - Measuring of semiconductor - Google Patents
Measuring of semiconductorInfo
- Publication number
- JPS5567149A JPS5567149A JP14089878A JP14089878A JPS5567149A JP S5567149 A JPS5567149 A JP S5567149A JP 14089878 A JP14089878 A JP 14089878A JP 14089878 A JP14089878 A JP 14089878A JP S5567149 A JPS5567149 A JP S5567149A
- Authority
- JP
- Japan
- Prior art keywords
- eddy current
- carriers
- coil
- change
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To enable the measuring for lifetime of carriers and the resistivity without contact, by irradiating light pulses upon the total obverse side of a semiconductor to cause an eddy current therein and detecting the attenuation of the carriers in terms of the change in the eddy current. CONSTITUTION:A core 3 with a coil 4 is placed near the reverse side of a semiconductor substrate 1. A capacitor 5 is coupled in parallel with the coil 4. One terminal of the capacitor is connected to an AC power source 7 through a current detection resistor 6. Light pulses 2 are irradiated upon the entire obverse side of the substrate 1 to cause an eddy current therein. The change in the eddy current is measured through the terminals of the resistor 6. The change in carriers, which are caused by the light irradiation and which attenuate due to recombination when the light irradiation is stopped, is detected in terms of the variation in the eddy current. The coil 4 is displaced to measure the nonuniformity of the distribution of defects in the substrate 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14089878A JPS5567149A (en) | 1978-11-15 | 1978-11-15 | Measuring of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14089878A JPS5567149A (en) | 1978-11-15 | 1978-11-15 | Measuring of semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5567149A true JPS5567149A (en) | 1980-05-21 |
Family
ID=15279351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14089878A Pending JPS5567149A (en) | 1978-11-15 | 1978-11-15 | Measuring of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5567149A (en) |
-
1978
- 1978-11-15 JP JP14089878A patent/JPS5567149A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050107 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060822 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20060905 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20061129 |
|
| A602 | Written permission of extension of time |
Effective date: 20070122 Free format text: JAPANESE INTERMEDIATE CODE: A602 |
|
| A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20070420 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
| A02 | Decision of refusal |
Effective date: 20070529 Free format text: JAPANESE INTERMEDIATE CODE: A02 |