JPS5568631A - Pattern inspection system - Google Patents

Pattern inspection system

Info

Publication number
JPS5568631A
JPS5568631A JP14190978A JP14190978A JPS5568631A JP S5568631 A JPS5568631 A JP S5568631A JP 14190978 A JP14190978 A JP 14190978A JP 14190978 A JP14190978 A JP 14190978A JP S5568631 A JPS5568631 A JP S5568631A
Authority
JP
Japan
Prior art keywords
pattern
verge
memory
black spot
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14190978A
Other languages
Japanese (ja)
Inventor
Kikuo Mita
Masayuki Oyama
Taku Yoshida
Masahito Nakajima
Katsumi Nakafujiwara
Tadao Nakakuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14190978A priority Critical patent/JPS5568631A/en
Publication of JPS5568631A publication Critical patent/JPS5568631A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To dispense with manual sorting, by inspecting the region of a pattern stored in a memory and the vicinity of the region.
CONSTITUTION: A section A-A' of a pattern data memory 10 and a section B-B' of a pattern verge signal memory 8 are observed. When a pattern verge signal is detected at a point P' on the memory 8, the OR of values at several points under another corresponding point P on the memory 10 is taken by an OR circuit 12. After it is confirmed that there is a pattern under a pattern verge, it is checked about several bits over the point P by another OR circuit 13 whether there is a black spot or not. A black spot is regarded as present near a pattern when the pattern verge signal is detected at the point P' and the OR circuits 12, 13 generate outputs. At that time, an AND circuit 14 produces a black spot detection signal (f). It is detected judged in the same manner about other points on a pattern verge whether there is a black spot or not.
COPYRIGHT: (C)1980,JPO&Japio
JP14190978A 1978-11-17 1978-11-17 Pattern inspection system Pending JPS5568631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14190978A JPS5568631A (en) 1978-11-17 1978-11-17 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14190978A JPS5568631A (en) 1978-11-17 1978-11-17 Pattern inspection system

Publications (1)

Publication Number Publication Date
JPS5568631A true JPS5568631A (en) 1980-05-23

Family

ID=15302973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14190978A Pending JPS5568631A (en) 1978-11-17 1978-11-17 Pattern inspection system

Country Status (1)

Country Link
JP (1) JPS5568631A (en)

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