JPS5574406A - Inspection of pattern defect - Google Patents

Inspection of pattern defect

Info

Publication number
JPS5574406A
JPS5574406A JP14775378A JP14775378A JPS5574406A JP S5574406 A JPS5574406 A JP S5574406A JP 14775378 A JP14775378 A JP 14775378A JP 14775378 A JP14775378 A JP 14775378A JP S5574406 A JPS5574406 A JP S5574406A
Authority
JP
Japan
Prior art keywords
signals
light beam
time difference
mask
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14775378A
Other languages
Japanese (ja)
Other versions
JPH0139044B2 (en
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14775378A priority Critical patent/JPS5574406A/en
Publication of JPS5574406A publication Critical patent/JPS5574406A/en
Publication of JPH0139044B2 publication Critical patent/JPH0139044B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To obtain the position shift by scanning both the master and copy mask positioning marks with a reference light beam and an inspection light beam and by compensating the time difference between two signals with a delay of one side signal. CONSTITUTION:The master mask 100, its positioning mark 102, copy mask 200 and its positioning mark 202 scanned with a reference light beam and an inspection light beam synchronously along the lines alpha, beta, gamma to convert themselves into image signals. These signals A, A' are inverted and AND signals of both the said signals and the high frequency pulse sequence C are taken. A voltage signal proportional to the time difference between said signals A, A' is obtained, two pattern scanning signals between which the time difference is made zero is produced by the delay circuits 14, 24, and is fed to the pattern defect detecting circuit 50.
JP14775378A 1978-12-01 1978-12-01 Inspection of pattern defect Granted JPS5574406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14775378A JPS5574406A (en) 1978-12-01 1978-12-01 Inspection of pattern defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14775378A JPS5574406A (en) 1978-12-01 1978-12-01 Inspection of pattern defect

Publications (2)

Publication Number Publication Date
JPS5574406A true JPS5574406A (en) 1980-06-05
JPH0139044B2 JPH0139044B2 (en) 1989-08-17

Family

ID=15437363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14775378A Granted JPS5574406A (en) 1978-12-01 1978-12-01 Inspection of pattern defect

Country Status (1)

Country Link
JP (1) JPS5574406A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988605A (en) * 1982-11-12 1984-05-22 Hitachi Ltd Parts position inspection device
JPS59173736A (en) * 1983-03-11 1984-10-01 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン Defect detector
JPS60210744A (en) * 1984-04-03 1985-10-23 Mitsubishi Electric Corp Inspecting device for continuous object
JPS63265104A (en) * 1987-04-23 1988-11-01 Shigumatsukusu Kk Object inspection

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988605A (en) * 1982-11-12 1984-05-22 Hitachi Ltd Parts position inspection device
JPS59173736A (en) * 1983-03-11 1984-10-01 ケイエルエイ・インストラメンツ・コ−ポレ−シヨン Defect detector
JPS60210744A (en) * 1984-04-03 1985-10-23 Mitsubishi Electric Corp Inspecting device for continuous object
JPS63265104A (en) * 1987-04-23 1988-11-01 Shigumatsukusu Kk Object inspection

Also Published As

Publication number Publication date
JPH0139044B2 (en) 1989-08-17

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