JPS5575631A - Gas leakage amount measuring unit for sealed tube or sealed vessel and its method - Google Patents

Gas leakage amount measuring unit for sealed tube or sealed vessel and its method

Info

Publication number
JPS5575631A
JPS5575631A JP14899278A JP14899278A JPS5575631A JP S5575631 A JPS5575631 A JP S5575631A JP 14899278 A JP14899278 A JP 14899278A JP 14899278 A JP14899278 A JP 14899278A JP S5575631 A JPS5575631 A JP S5575631A
Authority
JP
Japan
Prior art keywords
density
sealed
measuring unit
gas leakage
amount measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14899278A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oval Engineering Co Ltd
Original Assignee
Oval Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oval Engineering Co Ltd filed Critical Oval Engineering Co Ltd
Priority to JP14899278A priority Critical patent/JPS5575631A/en
Publication of JPS5575631A publication Critical patent/JPS5575631A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To enable the measurement for a trace of leakage, by measuring the air density in the sealed vessel.
CONSTITUTION: The gas sealed in the sealed vessel 1 is made uniform density with the diffusing unit such as fan. This density is measured with the density meter 7 with high accuracy in which the vibration tube 9 is oscillated with the drive coil 10 and the vibration inversely proportional to the density is detected with the reception coil 11, and a trace of leakage can be measured with the detection of the density change due to leakage.
COPYRIGHT: (C)1980,JPO&Japio
JP14899278A 1978-12-04 1978-12-04 Gas leakage amount measuring unit for sealed tube or sealed vessel and its method Pending JPS5575631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14899278A JPS5575631A (en) 1978-12-04 1978-12-04 Gas leakage amount measuring unit for sealed tube or sealed vessel and its method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14899278A JPS5575631A (en) 1978-12-04 1978-12-04 Gas leakage amount measuring unit for sealed tube or sealed vessel and its method

Publications (1)

Publication Number Publication Date
JPS5575631A true JPS5575631A (en) 1980-06-07

Family

ID=15465270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14899278A Pending JPS5575631A (en) 1978-12-04 1978-12-04 Gas leakage amount measuring unit for sealed tube or sealed vessel and its method

Country Status (1)

Country Link
JP (1) JPS5575631A (en)

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