JPS5576904A - Method for detecting position of mark - Google Patents

Method for detecting position of mark

Info

Publication number
JPS5576904A
JPS5576904A JP15156978A JP15156978A JPS5576904A JP S5576904 A JPS5576904 A JP S5576904A JP 15156978 A JP15156978 A JP 15156978A JP 15156978 A JP15156978 A JP 15156978A JP S5576904 A JPS5576904 A JP S5576904A
Authority
JP
Japan
Prior art keywords
mark
outputs
detectors
groove mark
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15156978A
Other languages
Japanese (ja)
Inventor
Nobuyuki Yasutake
Junichi Kai
Toru Funayama
Tadashi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15156978A priority Critical patent/JPS5576904A/en
Publication of JPS5576904A publication Critical patent/JPS5576904A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE: To accurately detect a coordinate position, by projecting a square-shaped electron beam, utilizing the sharpness of the edges of a V-groove mark and symmetry and providing detectors in symmetric positions.
CONSTITUTION: An electron beam shaped to a squere with a side length of (a) is scanned across a V-groove mark. The length of scanning across the V-groove mark is proportional to a quantity of detected charge. Detectors are symmetrically arranged on both the sides of outputs the V-groove mark and so connected to each other that the outputs of the detectors are inverse to each other. The outputs are added to each other to detect the position of the mark.
COPYRIGHT: (C)1980,JPO&Japio
JP15156978A 1978-12-07 1978-12-07 Method for detecting position of mark Pending JPS5576904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15156978A JPS5576904A (en) 1978-12-07 1978-12-07 Method for detecting position of mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15156978A JPS5576904A (en) 1978-12-07 1978-12-07 Method for detecting position of mark

Publications (1)

Publication Number Publication Date
JPS5576904A true JPS5576904A (en) 1980-06-10

Family

ID=15521387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15156978A Pending JPS5576904A (en) 1978-12-07 1978-12-07 Method for detecting position of mark

Country Status (1)

Country Link
JP (1) JPS5576904A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128307A (en) * 1983-12-15 1985-07-09 Toshiba Corp Shape and size measuring method using focusing electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128307A (en) * 1983-12-15 1985-07-09 Toshiba Corp Shape and size measuring method using focusing electron beam

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