JPS558005A - Bonding pad substructure - Google Patents

Bonding pad substructure

Info

Publication number
JPS558005A
JPS558005A JP7867278A JP7867278A JPS558005A JP S558005 A JPS558005 A JP S558005A JP 7867278 A JP7867278 A JP 7867278A JP 7867278 A JP7867278 A JP 7867278A JP S558005 A JPS558005 A JP S558005A
Authority
JP
Japan
Prior art keywords
film
pad
bonding pad
bonding
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7867278A
Other languages
Japanese (ja)
Inventor
Zenzo Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7867278A priority Critical patent/JPS558005A/en
Publication of JPS558005A publication Critical patent/JPS558005A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/981—Auxiliary members, e.g. spacers
    • H10W72/983—Reinforcing structures, e.g. collars

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE: To provide a bonding pad through an insulating film oppositely to a metallic film on a base body in such a manner that the pad is not exfoliated by an external force to be applied at the time of bonding or joining.
CONSTITUTION: After a thin film of permalloy is formed on the surface of a base body 1 of garnet film, it is etched to provide an abnormal bubble controlling film 2 and plural pieces of metallic films 6 which are completely separated from each other (or one another). An insulating film 3 is formed on this, and a bonding pad 4 is provided oppositely to the position of the metallic film 6, and then a protective film 5 is prepared by eliminating the pad section. By employing such a substructure for a bonding pad, it is possible to increase strength of the pad and minimize pad exfoliation problem.
COPYRIGHT: (C)1980,JPO&Japio
JP7867278A 1978-06-30 1978-06-30 Bonding pad substructure Pending JPS558005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7867278A JPS558005A (en) 1978-06-30 1978-06-30 Bonding pad substructure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7867278A JPS558005A (en) 1978-06-30 1978-06-30 Bonding pad substructure

Publications (1)

Publication Number Publication Date
JPS558005A true JPS558005A (en) 1980-01-21

Family

ID=13668348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7867278A Pending JPS558005A (en) 1978-06-30 1978-06-30 Bonding pad substructure

Country Status (1)

Country Link
JP (1) JPS558005A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57200953A (en) * 1981-06-02 1982-12-09 Toshiba Corp Optical record carrier reader
JPS5892941A (en) * 1981-11-30 1983-06-02 Shimadzu Corp Detecting method for stable measurement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57200953A (en) * 1981-06-02 1982-12-09 Toshiba Corp Optical record carrier reader
JPS5892941A (en) * 1981-11-30 1983-06-02 Shimadzu Corp Detecting method for stable measurement

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