JPS5582776A - Heating element for evaporation - Google Patents

Heating element for evaporation

Info

Publication number
JPS5582776A
JPS5582776A JP15479478A JP15479478A JPS5582776A JP S5582776 A JPS5582776 A JP S5582776A JP 15479478 A JP15479478 A JP 15479478A JP 15479478 A JP15479478 A JP 15479478A JP S5582776 A JPS5582776 A JP S5582776A
Authority
JP
Japan
Prior art keywords
twisting
evaporation
wire rod
molten aluminum
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15479478A
Other languages
Japanese (ja)
Inventor
Katsuji Ohashi
Tadashi Shimizu
Osamu Yamazaki
Ryozo Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15479478A priority Critical patent/JPS5582776A/en
Publication of JPS5582776A publication Critical patent/JPS5582776A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve and accelerate the wettability of molten aluminum with heating coil for evaporation and evaporation of molten aluminum, by forming twisting together wire rod having 5-15 deg. of twisting angle against axis line direction. CONSTITUTION:Heating element is formed in conical shape by twisting together plural wire rods 1, such as tungsten etc., having, for example, 5-15 deg. of twisting angle in axis line direction. Molten aluminum 2 is diffused in wide area uniformly flowing on the surface of the wire rod 1 or in the space of each wire rod 1 along twisting direction easily and rapidly and is evaporated in a uniform evaporation amount and speed and then, a good evaporation is carried out. Flowing diffusion is accelerated moreover by providing the twisting linear groove 3 on the surface of the wire rod 1. The above heating element is suitable for that of fusing and evaporating the metal to be evaporated, such as Al etc.
JP15479478A 1978-12-14 1978-12-14 Heating element for evaporation Pending JPS5582776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15479478A JPS5582776A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15479478A JPS5582776A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Publications (1)

Publication Number Publication Date
JPS5582776A true JPS5582776A (en) 1980-06-21

Family

ID=15592029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15479478A Pending JPS5582776A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Country Status (1)

Country Link
JP (1) JPS5582776A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0186090U (en) * 1987-11-28 1989-06-07
JPWO2013039195A1 (en) * 2011-09-14 2015-03-26 グンゼ株式会社 Radiation protection fabric

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0186090U (en) * 1987-11-28 1989-06-07
JPWO2013039195A1 (en) * 2011-09-14 2015-03-26 グンゼ株式会社 Radiation protection fabric

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