JPS5582904A - Measuring device - Google Patents

Measuring device

Info

Publication number
JPS5582904A
JPS5582904A JP15708378A JP15708378A JPS5582904A JP S5582904 A JPS5582904 A JP S5582904A JP 15708378 A JP15708378 A JP 15708378A JP 15708378 A JP15708378 A JP 15708378A JP S5582904 A JPS5582904 A JP S5582904A
Authority
JP
Japan
Prior art keywords
light
foci
measured
oscillatory
electric signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15708378A
Other languages
Japanese (ja)
Other versions
JPS5952962B2 (en
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15708378A priority Critical patent/JPS5952962B2/en
Publication of JPS5582904A publication Critical patent/JPS5582904A/en
Publication of JPS5952962B2 publication Critical patent/JPS5952962B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To accurately measure the diameter or degree of concentricity of a hole made in a measured body, by shooting modulatory light into a holographic lens having a plurality of foci, then irradiating the light upon the measured body and analyzing a signal of the light reflected from the body.
CONSTITUTION: Laser light L emitted from a laser light oscillator is caused to perform prescribed modulation by a polarizer 2. The oscillatory light is entered into a holographic lens having a plurality of foci which are located in prescribed positions due to holography. The light is irradiated upon a mesured body 6 positioned on the foci. The oscillatory light reflected from the body 6 is changed into an electric signal by a sensor 10. The electric signal is processed to detect the dimensional accuracy of the body 6. A plurality of parts of the body 6 can be automatically and simultaneously measured with high accuracy.
COPYRIGHT: (C)1980,JPO&Japio
JP15708378A 1978-12-19 1978-12-19 measuring device Expired JPS5952962B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15708378A JPS5952962B2 (en) 1978-12-19 1978-12-19 measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15708378A JPS5952962B2 (en) 1978-12-19 1978-12-19 measuring device

Publications (2)

Publication Number Publication Date
JPS5582904A true JPS5582904A (en) 1980-06-23
JPS5952962B2 JPS5952962B2 (en) 1984-12-22

Family

ID=15641867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15708378A Expired JPS5952962B2 (en) 1978-12-19 1978-12-19 measuring device

Country Status (1)

Country Link
JP (1) JPS5952962B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101858736A (en) * 2010-05-10 2010-10-13 北京理工大学 Method and device for measuring ultra-large radius of curvature with multi-focus holographic differential confocal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101858736A (en) * 2010-05-10 2010-10-13 北京理工大学 Method and device for measuring ultra-large radius of curvature with multi-focus holographic differential confocal

Also Published As

Publication number Publication date
JPS5952962B2 (en) 1984-12-22

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