JPS5582943A - Novel replica thin-film for specimen of electron microscope and its preparation - Google Patents

Novel replica thin-film for specimen of electron microscope and its preparation

Info

Publication number
JPS5582943A
JPS5582943A JP15578178A JP15578178A JPS5582943A JP S5582943 A JPS5582943 A JP S5582943A JP 15578178 A JP15578178 A JP 15578178A JP 15578178 A JP15578178 A JP 15578178A JP S5582943 A JPS5582943 A JP S5582943A
Authority
JP
Japan
Prior art keywords
specimen
sample
gas
vacuum
film layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15578178A
Other languages
Japanese (ja)
Inventor
Akira Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOUKIYOUTO
Original Assignee
TOUKIYOUTO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOUKIYOUTO filed Critical TOUKIYOUTO
Priority to JP15578178A priority Critical patent/JPS5582943A/en
Publication of JPS5582943A publication Critical patent/JPS5582943A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/2806—Means for preparing replicas of specimens, e.g. for microscopal analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To obtain a uniform thin-film layer that accurately imitates the minute structure of a sample surface, by providing the sample surface of a specimen with a high-molecular polymer film gained by plasma-polymerizing organic monomer vapor under a specified condition of glow discharge. CONSTITUTION:A specimen sample 1 is placed on a negative plate 2'' in a vacuum tank, and the inside of the system is brought to the high vacuum of approximate 10<-5>Torr by discharging unnecessary gas in the system by means of a vacuum pump. The gas or vapor of an organic monomer is introduced to the system, pressure in the system is increased to the gas pressure of approximate 0.1Torr, and electrons are glow-discharged by applying the DC discharge voltage of 0.5-3kV to the negative plate and a positive plate 2''. The flow rate and vacuum discharge quantity of the gas or vapor of the organic monomer are adjusted so that glow discharge current density be kept in 0.2-2mA/cm<2> during the time, and continued for 10-15 minutes. Thus, since a high-molecular polymer film layer 2 with uniform thickness is formed on a surface of the specimen sample 1, the sample 1 is extracted, the polymer film layer 2 is separated and a replica thin-film is obtained.
JP15578178A 1978-12-19 1978-12-19 Novel replica thin-film for specimen of electron microscope and its preparation Pending JPS5582943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15578178A JPS5582943A (en) 1978-12-19 1978-12-19 Novel replica thin-film for specimen of electron microscope and its preparation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15578178A JPS5582943A (en) 1978-12-19 1978-12-19 Novel replica thin-film for specimen of electron microscope and its preparation

Publications (1)

Publication Number Publication Date
JPS5582943A true JPS5582943A (en) 1980-06-23

Family

ID=15613262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15578178A Pending JPS5582943A (en) 1978-12-19 1978-12-19 Novel replica thin-film for specimen of electron microscope and its preparation

Country Status (1)

Country Link
JP (1) JPS5582943A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5777943A (en) * 1980-11-04 1982-05-15 Mitsubishi Heavy Ind Ltd Preparing method for sample for x-ray microanalyzer
JPS6335941U (en) * 1986-08-26 1988-03-08
JP2016085119A (en) * 2014-10-27 2016-05-19 国立大学法人山口大学 Preparation method of electron microscope observation sample
CN105699167A (en) * 2016-01-26 2016-06-22 哈尔滨工业大学深圳研究生院 Flexible film brittle failure method
CN111077267A (en) * 2020-01-14 2020-04-28 东莞东阳光科研发有限公司 Method for the determination of lead content in electronic foils

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5777943A (en) * 1980-11-04 1982-05-15 Mitsubishi Heavy Ind Ltd Preparing method for sample for x-ray microanalyzer
JPS6335941U (en) * 1986-08-26 1988-03-08
JP2016085119A (en) * 2014-10-27 2016-05-19 国立大学法人山口大学 Preparation method of electron microscope observation sample
CN105699167A (en) * 2016-01-26 2016-06-22 哈尔滨工业大学深圳研究生院 Flexible film brittle failure method
CN111077267A (en) * 2020-01-14 2020-04-28 东莞东阳光科研发有限公司 Method for the determination of lead content in electronic foils
CN111077267B (en) * 2020-01-14 2022-04-29 东莞东阳光科研发有限公司 Method for measuring lead content in electronic optical foil

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