JPS5583142A - Exciting method of electromagnetic lens - Google Patents

Exciting method of electromagnetic lens

Info

Publication number
JPS5583142A
JPS5583142A JP15648478A JP15648478A JPS5583142A JP S5583142 A JPS5583142 A JP S5583142A JP 15648478 A JP15648478 A JP 15648478A JP 15648478 A JP15648478 A JP 15648478A JP S5583142 A JPS5583142 A JP S5583142A
Authority
JP
Japan
Prior art keywords
current
electromagnetic lens
residual field
amplitude
influence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15648478A
Other languages
Japanese (ja)
Other versions
JPS593020B2 (en
Inventor
Tadashi Otaka
Kimio Kanda
Minoru Shimizu
Minoru Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP53156484A priority Critical patent/JPS593020B2/en
Publication of JPS5583142A publication Critical patent/JPS5583142A/en
Publication of JPS593020B2 publication Critical patent/JPS593020B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To eliminate the influence of residual field produced in magnetic material of electromagnetic lens, by supplying AC current the amplitude and the direction of which varies with time onto exciting coil then performing excitation with DC current of predetermined level.
CONSTITUTION: AC power source 9 and switch 10 are newly provided and before supplying DC current from DC power sources 7, 8 to the exciting coil of electron lens for capacitor lenses 2, 3 and objective lenses 4, AC current having amplitude and direction varying with time is supplied from AC power source 9 at least one period and the AC current is blocked when it is zero level. Thereafter predetermined level of current from DC power sources 7, 8 performs excitation. When exciting the electromagnetic lens in such a manner, the strength of residual field is very small while it is excited again under constant state, thereby the influence of residual field can be eliminated completely.
COPYRIGHT: (C)1980,JPO&Japio
JP53156484A 1978-12-20 1978-12-20 How to excite an electromagnetic lens Expired JPS593020B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53156484A JPS593020B2 (en) 1978-12-20 1978-12-20 How to excite an electromagnetic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53156484A JPS593020B2 (en) 1978-12-20 1978-12-20 How to excite an electromagnetic lens

Publications (2)

Publication Number Publication Date
JPS5583142A true JPS5583142A (en) 1980-06-23
JPS593020B2 JPS593020B2 (en) 1984-01-21

Family

ID=15628760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53156484A Expired JPS593020B2 (en) 1978-12-20 1978-12-20 How to excite an electromagnetic lens

Country Status (1)

Country Link
JP (1) JPS593020B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008192521A (en) * 2007-02-07 2008-08-21 Hitachi High-Technologies Corp Charged particle beam equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008192521A (en) * 2007-02-07 2008-08-21 Hitachi High-Technologies Corp Charged particle beam equipment

Also Published As

Publication number Publication date
JPS593020B2 (en) 1984-01-21

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