JPS5583143A - Exhaust system for electron beam equipment - Google Patents

Exhaust system for electron beam equipment

Info

Publication number
JPS5583143A
JPS5583143A JP15886178A JP15886178A JPS5583143A JP S5583143 A JPS5583143 A JP S5583143A JP 15886178 A JP15886178 A JP 15886178A JP 15886178 A JP15886178 A JP 15886178A JP S5583143 A JPS5583143 A JP S5583143A
Authority
JP
Japan
Prior art keywords
exhaust tube
specimen
sub
chamber
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15886178A
Other languages
Japanese (ja)
Inventor
Nagamitsu Yoshimura
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15886178A priority Critical patent/JPS5583143A/en
Publication of JPS5583143A publication Critical patent/JPS5583143A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent the pressure rise in electron gun chamber occurring during replacement of specimen without requiring dedicated vacuum pump, by providing such as orifice electromagnetic valve for reducing the exhaust conductance of sub- exhaust tube connected to specimen chamber.
CONSTITUTION: Orifice type electromagnetic valve 15, for example, is provided to aux. exhaust tube 14 for bypassing the main valve 5b provided on sub-exhaust tube 6b connected to specimen chamber 4, where the exhaust conductance due to exhaust tube 14 is made considerably smaller than that due to sub-exhaust tube 6b. Cooling trap 16 is provided at the cross-point between main exhaust tube 6 and sub-exhaust tube 6b connected to specimen chamber 4, and when providing said trap gas molecule from specimen chamber 4 through tube 6b impinges more than one time against the cooling face of trap. Consequently the pressure rise in electron chamber during replacement of specimen can be prevented.
COPYRIGHT: (C)1980,JPO&Japio
JP15886178A 1978-12-19 1978-12-19 Exhaust system for electron beam equipment Pending JPS5583143A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15886178A JPS5583143A (en) 1978-12-19 1978-12-19 Exhaust system for electron beam equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15886178A JPS5583143A (en) 1978-12-19 1978-12-19 Exhaust system for electron beam equipment

Publications (1)

Publication Number Publication Date
JPS5583143A true JPS5583143A (en) 1980-06-23

Family

ID=15680995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15886178A Pending JPS5583143A (en) 1978-12-19 1978-12-19 Exhaust system for electron beam equipment

Country Status (1)

Country Link
JP (1) JPS5583143A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164471A (en) * 1983-03-07 1984-09-17 Anelva Corp Conductance valve pressure controller
JPS59192258U (en) * 1983-06-09 1984-12-20 セイコーインスツルメンツ株式会社 Aerotonic device in X-ray analyzer
JPS6363954A (en) * 1986-09-05 1988-03-22 Shimadzu Corp Fluorescent x-ray analyzer
US5442183A (en) * 1990-06-20 1995-08-15 Hitachi, Ltd. Charged particle beam apparatus including means for maintaining a vacuum seal
CN103370768A (en) * 2011-03-01 2013-10-23 应用材料公司 Vacuum chambers with shared pumps

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164471A (en) * 1983-03-07 1984-09-17 Anelva Corp Conductance valve pressure controller
JPS59192258U (en) * 1983-06-09 1984-12-20 セイコーインスツルメンツ株式会社 Aerotonic device in X-ray analyzer
JPS6363954A (en) * 1986-09-05 1988-03-22 Shimadzu Corp Fluorescent x-ray analyzer
US5442183A (en) * 1990-06-20 1995-08-15 Hitachi, Ltd. Charged particle beam apparatus including means for maintaining a vacuum seal
CN103370768A (en) * 2011-03-01 2013-10-23 应用材料公司 Vacuum chambers with shared pumps
CN107164742A (en) * 2011-03-01 2017-09-15 应用材料公司 Vacuum chamber with shared pump

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