JPS5583838A - Scattered light measuring unit of multi-layer dielectric film - Google Patents

Scattered light measuring unit of multi-layer dielectric film

Info

Publication number
JPS5583838A
JPS5583838A JP15952078A JP15952078A JPS5583838A JP S5583838 A JPS5583838 A JP S5583838A JP 15952078 A JP15952078 A JP 15952078A JP 15952078 A JP15952078 A JP 15952078A JP S5583838 A JPS5583838 A JP S5583838A
Authority
JP
Japan
Prior art keywords
dielectric film
layer dielectric
light
receiving element
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15952078A
Other languages
Japanese (ja)
Inventor
Hiroshi Saeki
Keiji Yamada
Hiroshi Takizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15952078A priority Critical patent/JPS5583838A/en
Publication of JPS5583838A publication Critical patent/JPS5583838A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To decide whether a multi-layer dielectric film is good or not easily and cheaply by arranging the photosensitive face of a light receiving element oppositely to the multi-layer dielectric film face and providing a hole, where the light from a light source and the reflection light from the multi-layer dielectric film face pass, in the light receiving element. CONSTITUTION:A solar battery is used as light receiving element 7, and light receiving element 7 is so arranged that the photosensitive face may be opposite to multi-layer dielectric film 10, and hole 8 where the laser light from the He-Ne laser tube of a light source and the reflection light from multi-layer dielectric film 10 pass is provided in light receiving element 7, and this measuring system is stored in dark box 14. A scattered light quantity, namely, the output voltage of the light receiving element measured by this unit is proportional to the laser output obtained by arranging the multi-layer dielectric film in the laser tube. Thus, it can be decided whether the multi-layer dielectric film is good or not cheaply with a high work efficiency.
JP15952078A 1978-12-21 1978-12-21 Scattered light measuring unit of multi-layer dielectric film Pending JPS5583838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15952078A JPS5583838A (en) 1978-12-21 1978-12-21 Scattered light measuring unit of multi-layer dielectric film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15952078A JPS5583838A (en) 1978-12-21 1978-12-21 Scattered light measuring unit of multi-layer dielectric film

Publications (1)

Publication Number Publication Date
JPS5583838A true JPS5583838A (en) 1980-06-24

Family

ID=15695556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15952078A Pending JPS5583838A (en) 1978-12-21 1978-12-21 Scattered light measuring unit of multi-layer dielectric film

Country Status (1)

Country Link
JP (1) JPS5583838A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151141U (en) * 1983-03-29 1984-10-09 日本電子株式会社 Sample pan in a spectrophotometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59151141U (en) * 1983-03-29 1984-10-09 日本電子株式会社 Sample pan in a spectrophotometer

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