JPS5583867A - Electron beam energy analyzer - Google Patents

Electron beam energy analyzer

Info

Publication number
JPS5583867A
JPS5583867A JP15648678A JP15648678A JPS5583867A JP S5583867 A JPS5583867 A JP S5583867A JP 15648678 A JP15648678 A JP 15648678A JP 15648678 A JP15648678 A JP 15648678A JP S5583867 A JPS5583867 A JP S5583867A
Authority
JP
Japan
Prior art keywords
electron beam
gain
14aw14c
13aw13c
12aw12c
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15648678A
Other languages
Japanese (ja)
Inventor
Shigeto Sunakozawa
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15648678A priority Critical patent/JPS5583867A/en
Publication of JPS5583867A publication Critical patent/JPS5583867A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To make display of electron beam spectrum possible by utilizing that an electron beam energy level is reduced in exponential function for energy, where the strength of sample transmission electron beam spectrum is lost, and switching automatically the gain of a signal amplifier according to the electron beam energy level.
CONSTITUTION: The DC voltage from DC voltage power source 9 and the saw tooth wave from saw tooth wave generator 10 are added by driving power source 8 and are flowed to separation unit 3, where the electron beam passing through a sample is incident, as a varied current. Further, the output of generator 10 is inputted to one terminals of comparators 12aW12c where set voltages E1WE3 are given from reference power sources 11aW11c, and gain adjusting switches 14aW14c connected in series to gain adjusting feedback resistors 13aW13c provided in signal amplifier 6 are closed successively by outputs of comparators 12aW12c. By the constitution above, the gain of amplifier 6 is automatically switched to a gain according to resistance values of resistors 13aW13c according to swtiching of switches 14aW14c.
COPYRIGHT: (C)1980,JPO&Japio
JP15648678A 1978-12-20 1978-12-20 Electron beam energy analyzer Pending JPS5583867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15648678A JPS5583867A (en) 1978-12-20 1978-12-20 Electron beam energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15648678A JPS5583867A (en) 1978-12-20 1978-12-20 Electron beam energy analyzer

Publications (1)

Publication Number Publication Date
JPS5583867A true JPS5583867A (en) 1980-06-24

Family

ID=15628803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15648678A Pending JPS5583867A (en) 1978-12-20 1978-12-20 Electron beam energy analyzer

Country Status (1)

Country Link
JP (1) JPS5583867A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116649A (en) * 1984-11-12 1986-06-04 Science & Tech Agency Electron beam non-destructive inspection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116649A (en) * 1984-11-12 1986-06-04 Science & Tech Agency Electron beam non-destructive inspection

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