JPS5584956U - - Google Patents

Info

Publication number
JPS5584956U
JPS5584956U JP1978166804U JP16680478U JPS5584956U JP S5584956 U JPS5584956 U JP S5584956U JP 1978166804 U JP1978166804 U JP 1978166804U JP 16680478 U JP16680478 U JP 16680478U JP S5584956 U JPS5584956 U JP S5584956U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1978166804U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978166804U priority Critical patent/JPS5584956U/ja
Publication of JPS5584956U publication Critical patent/JPS5584956U/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
JP1978166804U 1978-12-04 1978-12-04 Pending JPS5584956U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978166804U JPS5584956U (ja) 1978-12-04 1978-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978166804U JPS5584956U (ja) 1978-12-04 1978-12-04

Publications (1)

Publication Number Publication Date
JPS5584956U true JPS5584956U (ja) 1980-06-11

Family

ID=29166442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978166804U Pending JPS5584956U (ja) 1978-12-04 1978-12-04

Country Status (1)

Country Link
JP (1) JPS5584956U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237948A (ja) * 1985-08-12 1987-02-18 Matsushita Electronics Corp 電子部品搭載用パッケージ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237948A (ja) * 1985-08-12 1987-02-18 Matsushita Electronics Corp 電子部品搭載用パッケージ

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