JPS5586060A - Ion detector for mass spectrometer - Google Patents

Ion detector for mass spectrometer

Info

Publication number
JPS5586060A
JPS5586060A JP16037078A JP16037078A JPS5586060A JP S5586060 A JPS5586060 A JP S5586060A JP 16037078 A JP16037078 A JP 16037078A JP 16037078 A JP16037078 A JP 16037078A JP S5586060 A JPS5586060 A JP S5586060A
Authority
JP
Japan
Prior art keywords
ion
electrodes
electrode
ion detection
detection electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16037078A
Other languages
Japanese (ja)
Other versions
JPS5841623B2 (en
Inventor
Masahiro Kusakabe
Shizuo Kimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ERIONIKUSU KK
Toshiba Corp
Original Assignee
ERIONIKUSU KK
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ERIONIKUSU KK, Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical ERIONIKUSU KK
Priority to JP53160370A priority Critical patent/JPS5841623B2/en
Publication of JPS5586060A publication Critical patent/JPS5586060A/en
Publication of JPS5841623B2 publication Critical patent/JPS5841623B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To simplify positioning by forming the various electrodes such as a number of ion detection electrodes, shielding electrodes, and output terminal electrodes and lead wires on a common substrate by way of plating, vacuum deposition, and ion coating.
CONSTITUTION: A number of ion detection electrodes 12 in specified configuration are arranged and formed at the preset position of the common substrate 11 consisting of insulating material such as quartz glass and the output terminal electrode 14 and the shielding electrode 15 are formed through the lead wire 13. The metallic plate 17 with the slit 16 is arranged at the position which is opposed to the ion detection electrode 12. By using such an ion detector, the ion which has each number of masses arrives at the ion detection electrode 12 through the slit 16 on the metallic plate 17. And the metallic plate 17 can prevent a part of ions which differ in the number of masses to be incident on each detection electrode 12 from being incident on another ion detection electrode.
COPYRIGHT: (C)1980,JPO&Japio
JP53160370A 1978-12-25 1978-12-25 Mass spectrometer ion detector Expired JPS5841623B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53160370A JPS5841623B2 (en) 1978-12-25 1978-12-25 Mass spectrometer ion detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53160370A JPS5841623B2 (en) 1978-12-25 1978-12-25 Mass spectrometer ion detector

Publications (2)

Publication Number Publication Date
JPS5586060A true JPS5586060A (en) 1980-06-28
JPS5841623B2 JPS5841623B2 (en) 1983-09-13

Family

ID=15713499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53160370A Expired JPS5841623B2 (en) 1978-12-25 1978-12-25 Mass spectrometer ion detector

Country Status (1)

Country Link
JP (1) JPS5841623B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6111261U (en) * 1984-06-26 1986-01-23 株式会社島津製作所 Helium leak detector analysis tube
CN102810441A (en) * 2011-06-01 2012-12-05 岛津分析技术研发（上海）有限公司 Preparation method of ion optic device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345033U (en) * 1986-09-10 1988-03-26
MX2019004681A (en) 2016-10-21 2019-10-07 Altor Bioscience Corp Multimeric il-15-based molecules.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6111261U (en) * 1984-06-26 1986-01-23 株式会社島津製作所 Helium leak detector analysis tube
CN102810441A (en) * 2011-06-01 2012-12-05 岛津分析技术研发（上海）有限公司 Preparation method of ion optic device

Also Published As

Publication number Publication date
JPS5841623B2 (en) 1983-09-13

Similar Documents

Publication Publication Date Title
ES358533A1 (en) Method of making an electrode
GB974667A (en) Improvements in and relating to the manufacture of multi-layer thin film electrical devices
JPS5249774A (en) Ion implanting device
JPS5433668A (en) Plasma deposition unit
JPS5412286A (en) Semiconductor device
JPS5632607A (en) Conductive terminal for heat resistant insulator substrate
GB763541A (en) Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material
JPS5337378A (en) Manufacture ofr flat type electron tube
JPS51118381A (en) Manufacturing process for semiconductor unit
JPS5217886A (en) Multikind ion detector
GB1233952A (en)
JPS5412496A (en) Electrically insulated terminal and method of manufacturing the same
JPS5586042A (en) Plasma display panel
JPS561918A (en) Production of electrochromic display device
GB1071645A (en) Apparatus for measuring weak ion currents
JPS51145265A (en) Lead-in port of introduction wiers for indicating electrode body on in sulating substratum
JPS5541702A (en) Glass film coating method for semiconductor
JPS53126270A (en) Production of semiconductor devices
JPS5841623B2 (en) Mass spectrometer ion detector
JPS5296394A (en) Insulating tube for power
JPS5613776A (en) Preparation of solar cell
JPS5289988A (en) Ion source for mass spectrometer
JPS56124280A (en) Manufacture of photoelectrically transducing film
JPS55161066A (en) Formation of covering film by ion plating
JPS57202632A (en) Planar display