JPS5589728A - Hot-cathode ionization vacuum meter - Google Patents
Hot-cathode ionization vacuum meterInfo
- Publication number
- JPS5589728A JPS5589728A JP16499078A JP16499078A JPS5589728A JP S5589728 A JPS5589728 A JP S5589728A JP 16499078 A JP16499078 A JP 16499078A JP 16499078 A JP16499078 A JP 16499078A JP S5589728 A JPS5589728 A JP S5589728A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- collector
- hot
- vacuum meter
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 abstract 6
- 230000035945 sensitivity Effects 0.000 abstract 2
- 238000009530 blood pressure measurement Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To obtain the vacuum meter of small size and high sensitivity which has less does of soft X-rays received with the ion collector, by locating the cathode outside the anode formed in spherical surface and locating the tip of the ion collector at the center of anode space.
CONSTITUTION: The wire 1 is stretched in spherical shape to form the anode 3 in the glass bulb tube 4, and hot-cathodes 6, 6a are provided at external circumference in arc shape. The tip of the ion collector 9 is pending so that it is at the center of the anode 3. With this constitution, thermoelectrons flow to the anode 3 from the hot cathod 6. Ions are produced from the collision of residual gas with thermoelectrons and pressure is obtained by amplifying the ion current. The locus of electron flow is considered as spherical and the ion current can be caught with high sensitivity since the collector 9 is located at the center. Further, since surface area of the collector 9 is small, the dose of soft X-rays is less, the limit of pressure measurement can be lowered, allowing to establish small sized and highly sensitive vacuum meter.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499078A JPS5815051B2 (en) | 1978-12-27 | 1978-12-27 | Hot cathode ionization vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499078A JPS5815051B2 (en) | 1978-12-27 | 1978-12-27 | Hot cathode ionization vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5589728A true JPS5589728A (en) | 1980-07-07 |
| JPS5815051B2 JPS5815051B2 (en) | 1983-03-23 |
Family
ID=15803735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499078A Expired JPS5815051B2 (en) | 1978-12-27 | 1978-12-27 | Hot cathode ionization vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815051B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63198840A (en) * | 1987-02-13 | 1988-08-17 | Fumio Watanabe | Hot-cathode ionization gauge |
| CN103762146A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Ionization gauge |
| CN103762147A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Anode structure of ionization gauge |
-
1978
- 1978-12-27 JP JP16499078A patent/JPS5815051B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63198840A (en) * | 1987-02-13 | 1988-08-17 | Fumio Watanabe | Hot-cathode ionization gauge |
| CN103762146A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Ionization gauge |
| CN103762147A (en) * | 2013-12-24 | 2014-04-30 | 兰州空间技术物理研究所 | Anode structure of ionization gauge |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5815051B2 (en) | 1983-03-23 |
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