JPS5590253A - Method and device for cutting off hard brittle material by vibration - Google Patents
Method and device for cutting off hard brittle material by vibrationInfo
- Publication number
- JPS5590253A JPS5590253A JP16178078A JP16178078A JPS5590253A JP S5590253 A JPS5590253 A JP S5590253A JP 16178078 A JP16178078 A JP 16178078A JP 16178078 A JP16178078 A JP 16178078A JP S5590253 A JPS5590253 A JP S5590253A
- Authority
- JP
- Japan
- Prior art keywords
- workpieces
- cutting
- rest
- vibrator
- hard brittle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000006061 abrasive grain Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
PURPOSE:To reduce an inertial force to motion and simultaneously and easily cut off and pick up numerous hard brittle wafers, by superposing low-frequency vibration and reciprocation on the workpieces of relatively small weight. CONSTITUTION:A vibrating system comprising a parallel spring 14, a workpiece mounting rest 16 and a vibrator 18 is provided on a sliding rest 11. The sliding rest is reciprocated by a reciprocating drive means at a desired travel in the direction of the cutting edge of a flat cutter 2. At the same time, the workpiece mounting rest 16 and workpieces 5 are vibrated at low frequency in a cutting-off direction by the vibrator 18. A working liquid in which abrasive grains are suspended is continuously supplied from a nozzle 20 to the parts of the workpieces to be cut off while the cutting edge of the flat cutter 2 is thrusted under a cutting-off load upon the workpieces 5. The workpieces are thus accurately and easily cut off as an inertial force to motion remains reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16178078A JPS5590253A (en) | 1978-12-27 | 1978-12-27 | Method and device for cutting off hard brittle material by vibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16178078A JPS5590253A (en) | 1978-12-27 | 1978-12-27 | Method and device for cutting off hard brittle material by vibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5590253A true JPS5590253A (en) | 1980-07-08 |
| JPS5746987B2 JPS5746987B2 (en) | 1982-10-06 |
Family
ID=15741756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16178078A Granted JPS5590253A (en) | 1978-12-27 | 1978-12-27 | Method and device for cutting off hard brittle material by vibration |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5590253A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817110U (en) * | 1981-07-27 | 1983-02-02 | 石川 憲一 | Hard and brittle material cutting and thin section cutting device using vibrating multi-blade method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60174988U (en) * | 1984-04-25 | 1985-11-20 | 松下電工株式会社 | differential heat sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49112287A (en) * | 1973-02-28 | 1974-10-25 | ||
| JPS51139773A (en) * | 1975-05-28 | 1976-12-02 | Toshiba Corp | Method of cutting a semiconductor material |
| JPS53124392A (en) * | 1976-12-27 | 1978-10-30 | Maieru Unto Burugaa Ag Maschf | Method of enhancing performance of slurry type reciprocating sawing machine |
-
1978
- 1978-12-27 JP JP16178078A patent/JPS5590253A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49112287A (en) * | 1973-02-28 | 1974-10-25 | ||
| JPS51139773A (en) * | 1975-05-28 | 1976-12-02 | Toshiba Corp | Method of cutting a semiconductor material |
| JPS53124392A (en) * | 1976-12-27 | 1978-10-30 | Maieru Unto Burugaa Ag Maschf | Method of enhancing performance of slurry type reciprocating sawing machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817110U (en) * | 1981-07-27 | 1983-02-02 | 石川 憲一 | Hard and brittle material cutting and thin section cutting device using vibrating multi-blade method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5746987B2 (en) | 1982-10-06 |
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