JPS5591190A - Method of forming pattern film - Google Patents

Method of forming pattern film

Info

Publication number
JPS5591190A
JPS5591190A JP16476978A JP16476978A JPS5591190A JP S5591190 A JPS5591190 A JP S5591190A JP 16476978 A JP16476978 A JP 16476978A JP 16476978 A JP16476978 A JP 16476978A JP S5591190 A JPS5591190 A JP S5591190A
Authority
JP
Japan
Prior art keywords
pattern film
forming pattern
forming
film
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16476978A
Other languages
Japanese (ja)
Other versions
JPS6147416B2 (en
Inventor
Mitsuru Kuga
Tsuneo Oka
Satoru Tsushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16476978A priority Critical patent/JPS5591190A/en
Publication of JPS5591190A publication Critical patent/JPS5591190A/en
Publication of JPS6147416B2 publication Critical patent/JPS6147416B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16476978A 1978-12-28 1978-12-28 Method of forming pattern film Granted JPS5591190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16476978A JPS5591190A (en) 1978-12-28 1978-12-28 Method of forming pattern film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16476978A JPS5591190A (en) 1978-12-28 1978-12-28 Method of forming pattern film

Publications (2)

Publication Number Publication Date
JPS5591190A true JPS5591190A (en) 1980-07-10
JPS6147416B2 JPS6147416B2 (en) 1986-10-18

Family

ID=15799573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16476978A Granted JPS5591190A (en) 1978-12-28 1978-12-28 Method of forming pattern film

Country Status (1)

Country Link
JP (1) JPS5591190A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02178655A (en) * 1988-12-28 1990-07-11 Nec Corp Method for forming original picture on printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02178655A (en) * 1988-12-28 1990-07-11 Nec Corp Method for forming original picture on printed circuit board

Also Published As

Publication number Publication date
JPS6147416B2 (en) 1986-10-18

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