JPS5596146A - Ultrasoniccwave inspection device - Google Patents

Ultrasoniccwave inspection device

Info

Publication number
JPS5596146A
JPS5596146A JP368979A JP368979A JPS5596146A JP S5596146 A JPS5596146 A JP S5596146A JP 368979 A JP368979 A JP 368979A JP 368979 A JP368979 A JP 368979A JP S5596146 A JPS5596146 A JP S5596146A
Authority
JP
Japan
Prior art keywords
ultrasoniccwave
inspection device
inspection
ultrasoniccwave inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP368979A
Other languages
Japanese (ja)
Other versions
JPS6053626B2 (en
Inventor
Tsutomu Yano
Akira Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP54003689A priority Critical patent/JPS6053626B2/en
Publication of JPS5596146A publication Critical patent/JPS5596146A/en
Publication of JPS6053626B2 publication Critical patent/JPS6053626B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
JP54003689A 1979-01-16 1979-01-16 Ultrasonic inspection device Expired JPS6053626B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54003689A JPS6053626B2 (en) 1979-01-16 1979-01-16 Ultrasonic inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54003689A JPS6053626B2 (en) 1979-01-16 1979-01-16 Ultrasonic inspection device

Publications (2)

Publication Number Publication Date
JPS5596146A true JPS5596146A (en) 1980-07-22
JPS6053626B2 JPS6053626B2 (en) 1985-11-26

Family

ID=11564360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54003689A Expired JPS6053626B2 (en) 1979-01-16 1979-01-16 Ultrasonic inspection device

Country Status (1)

Country Link
JP (1) JPS6053626B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107119A (en) * 2009-11-16 2011-06-02 Samsung Electro-Mechanics Co Ltd Circuit pattern defect inspection method of substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107119A (en) * 2009-11-16 2011-06-02 Samsung Electro-Mechanics Co Ltd Circuit pattern defect inspection method of substrate

Also Published As

Publication number Publication date
JPS6053626B2 (en) 1985-11-26

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