JPS5597720A - Elastic surface wave transducer - Google Patents
Elastic surface wave transducerInfo
- Publication number
- JPS5597720A JPS5597720A JP397979A JP397979A JPS5597720A JP S5597720 A JPS5597720 A JP S5597720A JP 397979 A JP397979 A JP 397979A JP 397979 A JP397979 A JP 397979A JP S5597720 A JPS5597720 A JP S5597720A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- slit
- metal thin
- film
- surface wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 4
- 239000010408 film Substances 0.000 abstract 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 abstract 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 abstract 1
- -1 etc. Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 239000011787 zinc oxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To obtain a transducer adequate for a high-frequency range and also to simplify weighting by forming a metal thin-film electrode on one surface of a piezoelectric film and electrodes with a slit on the other. CONSTITUTION:On the nearly-entire surface of substrate 1 of glass, etc., metal thin- film electrode 10 is formed by vapordeposition. On this metal thin-film electrode 10, piezoelectric film 11 of zinc oxide, cadmium sulfide, etc., is formed by sputtering. On piezoelectric film 11, electrodes 12A and 12B with a slit are formed by photoetching. One terminal of metal thin-film electrode 10 and slit elecrode 12A are connected to input terminals 5A and 5B respectively, and the other terminal of electrode 10 and slit electrode 12B are to output terminals 9A and 9B.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397979A JPS5597720A (en) | 1979-01-19 | 1979-01-19 | Elastic surface wave transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP397979A JPS5597720A (en) | 1979-01-19 | 1979-01-19 | Elastic surface wave transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5597720A true JPS5597720A (en) | 1980-07-25 |
Family
ID=11572156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP397979A Pending JPS5597720A (en) | 1979-01-19 | 1979-01-19 | Elastic surface wave transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5597720A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598418A (en) * | 1982-07-06 | 1984-01-17 | Clarion Co Ltd | Surface acoustic wave device |
| EP0279515A1 (en) * | 1987-01-24 | 1988-08-24 | Schlumberger Industries Limited | Sensors |
-
1979
- 1979-01-19 JP JP397979A patent/JPS5597720A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS598418A (en) * | 1982-07-06 | 1984-01-17 | Clarion Co Ltd | Surface acoustic wave device |
| EP0279515A1 (en) * | 1987-01-24 | 1988-08-24 | Schlumberger Industries Limited | Sensors |
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