JPS5598450A - X-ray analyzer - Google Patents

X-ray analyzer

Info

Publication number
JPS5598450A
JPS5598450A JP484479A JP484479A JPS5598450A JP S5598450 A JPS5598450 A JP S5598450A JP 484479 A JP484479 A JP 484479A JP 484479 A JP484479 A JP 484479A JP S5598450 A JPS5598450 A JP S5598450A
Authority
JP
Japan
Prior art keywords
faraday cup
make
sample
inexpensive
simplify
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP484479A
Other languages
Japanese (ja)
Inventor
Minoru Shimizu
Kimio Kanda
Tadashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP484479A priority Critical patent/JPS5598450A/en
Publication of JPS5598450A publication Critical patent/JPS5598450A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent erroneous action as well as to make it possible to simplify and make a moving mechanism of Faraday cup inexpensive by constituting incorporatively an optical microscope and the Faraday cup.
CONSTITUTION: Electron beams 4 gone out of an electron gun 1 are converged onto a sample 5 with use of a convergent lens 2 and an objective 3, and irradiated. A Faraday cup 6 is fitted through an insulating material 9 to the tip 8 of an optical microscope 7 to set the position of the sample on Rowland circle, this Faraday cup 6 has an ammeter 10 connected for reading out irradiating current of electron beam, and the microscope 7 is freely capable of sticking in and out at the sample chamber 11. This facilitates to prevent erroneous action as well as to make it possible to simplify and make a moving mechanism of a Faraday cup inexpensive.
COPYRIGHT: (C)1980,JPO&Japio
JP484479A 1979-01-22 1979-01-22 X-ray analyzer Pending JPS5598450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP484479A JPS5598450A (en) 1979-01-22 1979-01-22 X-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP484479A JPS5598450A (en) 1979-01-22 1979-01-22 X-ray analyzer

Publications (1)

Publication Number Publication Date
JPS5598450A true JPS5598450A (en) 1980-07-26

Family

ID=11594982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP484479A Pending JPS5598450A (en) 1979-01-22 1979-01-22 X-ray analyzer

Country Status (1)

Country Link
JP (1) JPS5598450A (en)

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