JPS5599152U - - Google Patents

Info

Publication number: JPS5599152U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1978182299U

Other languages

Japanese (ja)

Other versions

JPS6011644Y2 (ja

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-12-28

Filing date

1978-12-28

Publication date

1980-07-10

1978-12-28 Application filed filed Critical

1978-12-28 Priority to JP1978182299U priority Critical patent/JPS6011644Y2/ja

1980-07-10 Publication of JPS5599152U publication Critical patent/JPS5599152U/ja

1985-04-17 Application granted granted Critical

1985-04-17 Publication of JPS6011644Y2 publication Critical patent/JPS6011644Y2/ja

Status Expired legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate

JP1978182299U 1978-12-28 1978-12-28 半導体装置 Expired JPS6011644Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1978182299U JPS6011644Y2 (ja)	1978-12-28	1978-12-28	半導体装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1978182299U JPS6011644Y2 (ja)	1978-12-28	1978-12-28	半導体装置

Publications (2)

Publication Number	Publication Date
JPS5599152U true JPS5599152U (2)	1980-07-10
JPS6011644Y2 JPS6011644Y2 (ja)	1985-04-17

Family

ID=29193981

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1978182299U Expired JPS6011644Y2 (ja)	1978-12-28	1978-12-28	半導体装置

Country Status (1)

Country	Link
JP (1)	JPS6011644Y2 (2)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4943578A (2) *	1972-05-26	1974-04-24
JPS51123065A (en) *	1975-04-21	1976-10-27	Hitachi Ltd	Semiconductor device

1978
- 1978-12-28 JP JP1978182299U patent/JPS6011644Y2/ja not_active Expired

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4943578A (2) *	1972-05-26	1974-04-24
JPS51123065A (en) *	1975-04-21	1976-10-27	Hitachi Ltd	Semiconductor device

Also Published As

Publication number	Publication date
JPS6011644Y2 (ja)	1985-04-17

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