JPS5599785U - - Google Patents
Info
- Publication number
- JPS5599785U JPS5599785U JP17836678U JP17836678U JPS5599785U JP S5599785 U JPS5599785 U JP S5599785U JP 17836678 U JP17836678 U JP 17836678U JP 17836678 U JP17836678 U JP 17836678U JP S5599785 U JPS5599785 U JP S5599785U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17836678U JPS5599785U (fr) | 1978-12-28 | 1978-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17836678U JPS5599785U (fr) | 1978-12-28 | 1978-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5599785U true JPS5599785U (fr) | 1980-07-11 |
Family
ID=29188760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17836678U Pending JPS5599785U (fr) | 1978-12-28 | 1978-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5599785U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270453A (ja) * | 1987-04-24 | 1988-11-08 | Hitachi Chem Co Ltd | 窒化アルミニウム基板の金属化法 |
| JP2019062047A (ja) * | 2017-09-26 | 2019-04-18 | 三菱電機株式会社 | 異物除去ユニット、異物除去装置、検査装置および基板分割装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5015422U (fr) * | 1973-06-05 | 1975-02-18 |
-
1978
- 1978-12-28 JP JP17836678U patent/JPS5599785U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5015422U (fr) * | 1973-06-05 | 1975-02-18 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63270453A (ja) * | 1987-04-24 | 1988-11-08 | Hitachi Chem Co Ltd | 窒化アルミニウム基板の金属化法 |
| JP2019062047A (ja) * | 2017-09-26 | 2019-04-18 | 三菱電機株式会社 | 異物除去ユニット、異物除去装置、検査装置および基板分割装置 |