JPS56141737U - - Google Patents

Info

Publication number
JPS56141737U
JPS56141737U JP3852880U JP3852880U JPS56141737U JP S56141737 U JPS56141737 U JP S56141737U JP 3852880 U JP3852880 U JP 3852880U JP 3852880 U JP3852880 U JP 3852880U JP S56141737 U JPS56141737 U JP S56141737U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3852880U
Other versions
JPS5855254Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3852880U priority Critical patent/JPS5855254Y2/ja
Publication of JPS56141737U publication Critical patent/JPS56141737U/ja
Application granted granted Critical
Publication of JPS5855254Y2 publication Critical patent/JPS5855254Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP3852880U 1980-03-24 1980-03-24 減圧気相成長用装置 Expired JPS5855254Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3852880U JPS5855254Y2 (ja) 1980-03-24 1980-03-24 減圧気相成長用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3852880U JPS5855254Y2 (ja) 1980-03-24 1980-03-24 減圧気相成長用装置

Publications (2)

Publication Number Publication Date
JPS56141737U true JPS56141737U (ja) 1981-10-26
JPS5855254Y2 JPS5855254Y2 (ja) 1983-12-17

Family

ID=29634035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3852880U Expired JPS5855254Y2 (ja) 1980-03-24 1980-03-24 減圧気相成長用装置

Country Status (1)

Country Link
JP (1) JPS5855254Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63169719A (ja) * 1987-01-08 1988-07-13 Mitsubishi Electric Corp 化学反応装置
JPH0247266A (ja) * 1988-08-04 1990-02-16 Tel Sagami Ltd 処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63169719A (ja) * 1987-01-08 1988-07-13 Mitsubishi Electric Corp 化学反応装置
JPH0247266A (ja) * 1988-08-04 1990-02-16 Tel Sagami Ltd 処理装置

Also Published As

Publication number Publication date
JPS5855254Y2 (ja) 1983-12-17

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