JPS56161802A - Filtering treatment method - Google Patents

Filtering treatment method

Info

Publication number
JPS56161802A
JPS56161802A JP6481380A JP6481380A JPS56161802A JP S56161802 A JPS56161802 A JP S56161802A JP 6481380 A JP6481380 A JP 6481380A JP 6481380 A JP6481380 A JP 6481380A JP S56161802 A JPS56161802 A JP S56161802A
Authority
JP
Japan
Prior art keywords
water
filtering treatment
subjected
filtered
returned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6481380A
Other languages
Japanese (ja)
Inventor
Nobuo Fujie
Keiji Kuroiwa
Hideki Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6481380A priority Critical patent/JPS56161802A/en
Publication of JPS56161802A publication Critical patent/JPS56161802A/en
Pending legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PURPOSE: To obtain filtered water with good quality used in a semiconductor industry or the like at a high yield by a method wherein water to be treated is subjected to the filtering treatment densely at first and concentrated water not filtered is subjected to the filtering treatment roughly and, thereafter, returned to the first process.
CONSTITUTION: The water 4 to be treated pressurized by a pump P from a raw water tank T is supplied under pressure to an ultrafiltration device UF to be separated into the filtered water 5 and the unfiltered concentrated water 6. The concentrated water 6 is passed through a filter device F having a filter pore size larger than that of the ultrafiltration device UF to be subjected to the filtering treatment and, thereafter, returned to the raw water tank T. By this method, a large amount of ultrapure water can be prepared at a low cost.
COPYRIGHT: (C)1981,JPO&Japio
JP6481380A 1980-05-16 1980-05-16 Filtering treatment method Pending JPS56161802A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6481380A JPS56161802A (en) 1980-05-16 1980-05-16 Filtering treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6481380A JPS56161802A (en) 1980-05-16 1980-05-16 Filtering treatment method

Publications (1)

Publication Number Publication Date
JPS56161802A true JPS56161802A (en) 1981-12-12

Family

ID=13269052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6481380A Pending JPS56161802A (en) 1980-05-16 1980-05-16 Filtering treatment method

Country Status (1)

Country Link
JP (1) JPS56161802A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6090007A (en) * 1983-10-24 1985-05-21 Arubatsuku Service Kk Filter apparatus
JPS6211507A (en) * 1985-07-09 1987-01-20 Mitsubishi Rayon Eng Co Ltd Treatment of suspended matters in water and treating device therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6090007A (en) * 1983-10-24 1985-05-21 Arubatsuku Service Kk Filter apparatus
JPS6211507A (en) * 1985-07-09 1987-01-20 Mitsubishi Rayon Eng Co Ltd Treatment of suspended matters in water and treating device therefor

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