JPS5618335A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS5618335A
JPS5618335A JP9215779A JP9215779A JPS5618335A JP S5618335 A JPS5618335 A JP S5618335A JP 9215779 A JP9215779 A JP 9215779A JP 9215779 A JP9215779 A JP 9215779A JP S5618335 A JPS5618335 A JP S5618335A
Authority
JP
Japan
Prior art keywords
lab6
strut
thermally decomposed
axis
decomposed graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9215779A
Other languages
Japanese (ja)
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9215779A priority Critical patent/JPS5618335A/en
Publication of JPS5618335A publication Critical patent/JPS5618335A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To simplify the supporting structure of lanthanum hexaboride (LaB6) as well as suppress the alteration of the position of cathode due to thermal expansion by forming the sectional shape of two supporting parts into a rectangular shape and fastening them to a base so as to produce a pressing force in a fixed direction. CONSTITUTION:Both sides in the X-axis direction of the LaB6 material are in contact with thermally decomposed graphite 2 and their outsides are put between the tanthalum struts 3 and 4. The strut 3 is fastened to the base material 6, and its rectangular section is made coincident with the X-axis. If the other thermally decomposed graphite clipping LaB6 is pressed toward the direction of the strut 3 by the spring 8, the position of the LaB6 can be kept almost constant.
JP9215779A 1979-07-20 1979-07-20 Electron gun Pending JPS5618335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9215779A JPS5618335A (en) 1979-07-20 1979-07-20 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9215779A JPS5618335A (en) 1979-07-20 1979-07-20 Electron gun

Publications (1)

Publication Number Publication Date
JPS5618335A true JPS5618335A (en) 1981-02-21

Family

ID=14046581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9215779A Pending JPS5618335A (en) 1979-07-20 1979-07-20 Electron gun

Country Status (1)

Country Link
JP (1) JPS5618335A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235619U (en) * 1988-08-26 1990-03-07
JP2008166265A (en) * 2006-12-04 2008-07-17 Denki Kagaku Kogyo Kk Electron emission source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235619U (en) * 1988-08-26 1990-03-07
JP2008166265A (en) * 2006-12-04 2008-07-17 Denki Kagaku Kogyo Kk Electron emission source

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