JPS5624748A - Focal point detector for scanning type electron microscope - Google Patents
Focal point detector for scanning type electron microscopeInfo
- Publication number
- JPS5624748A JPS5624748A JP9735279A JP9735279A JPS5624748A JP S5624748 A JPS5624748 A JP S5624748A JP 9735279 A JP9735279 A JP 9735279A JP 9735279 A JP9735279 A JP 9735279A JP S5624748 A JPS5624748 A JP S5624748A
- Authority
- JP
- Japan
- Prior art keywords
- output
- focal point
- operates
- circuit
- integrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To improve the detection precision of a focal point by providing a means which operates a difference in the value when the focal length of an objective lens is modulated into positive and negative ones with a modulator. CONSTITUTION:When the first scanning of electron beam is completed, a sample and hold circuit (SH) 23 operates and the output of an integrator 22, i.e., the output of the signals integrated during this scanning period from an input signal operation circuit 21 is stored in a circuit SH 23. Subsequently, the integrator 22 is reset and integrates the output of the circuit 21 during the second scanning period. When this scanning is completed, the output of the integrator 22 is stored in SH 24. A subtractor 25 operates a difference between SH 23 and 24. When the output has been adjusted. SH 24 operates the value and displays it on a center-zero meter 19 through SH 26. On the other hand, when the focal point of an objective lens is optimum, insufficient, and excessive, since the output of SH 26 becomes zero, positive, and negative, respectively, adjust the meter 19 so as to read zero, repeating the above operation. This improves the detection precision of the focal point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9735279A JPS5624748A (en) | 1979-08-01 | 1979-08-01 | Focal point detector for scanning type electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9735279A JPS5624748A (en) | 1979-08-01 | 1979-08-01 | Focal point detector for scanning type electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5624748A true JPS5624748A (en) | 1981-03-09 |
Family
ID=14190088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9735279A Pending JPS5624748A (en) | 1979-08-01 | 1979-08-01 | Focal point detector for scanning type electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5624748A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59108251A (en) * | 1982-12-10 | 1984-06-22 | Hitachi Ltd | Astigmatism correction method for electron optical system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264865A (en) * | 1975-11-25 | 1977-05-28 | Shimadzu Corp | Focus detection unit of electronic line scanning-type image equipment |
-
1979
- 1979-08-01 JP JP9735279A patent/JPS5624748A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264865A (en) * | 1975-11-25 | 1977-05-28 | Shimadzu Corp | Focus detection unit of electronic line scanning-type image equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59108251A (en) * | 1982-12-10 | 1984-06-22 | Hitachi Ltd | Astigmatism correction method for electron optical system |
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