JPS5632134A - Vacuum contact printing method - Google Patents
Vacuum contact printing methodInfo
- Publication number
- JPS5632134A JPS5632134A JP10795879A JP10795879A JPS5632134A JP S5632134 A JPS5632134 A JP S5632134A JP 10795879 A JP10795879 A JP 10795879A JP 10795879 A JP10795879 A JP 10795879A JP S5632134 A JPS5632134 A JP S5632134A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- vacuum chamber
- transmittable
- atmospheric pressure
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000002508 contact lithography Methods 0.000 title 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To perform good image copying free from any distortion by simultaneously performing air exhausting from three vacuum chamber thence returning two vacuum chambers out of them down to the atmospheric pressure then performing exposure.
CONSTITUTION: First, the laminate of an original plate 6 and a photosensitive material is loaded, with the original plate 6 being positioned on the transmittable plate 9 side, in the 1st vacuum chamber 8 to be formed by being sandwiched with a rigid transmitable plate 9 and a flexible plate 10. Next, the 1st vacuum chamber 8 and the 2nd vacuum chamber 11 positioned on the flexible plate 10 side by way of this vacuum chamber 8 in-between are simultaneously exhausted of air and evacuated from the 3rd vacuum chamber 12 positioned on the transmittable plate 9 side. Thence, both the 2nd and 3rd vacuum chambers 11 and 12 are returned to the atmospheric pressure. After exposure is made from above the transmittable plate 9, the 1st vacuum chamber 8 is returned to the atmospheric pressure. The occurrence of contact failure among the transmittable plate 9, the original plate 6 and the photosensitive material 5 is obviated by using such process, hence the good image copying free from any distortion may be performed.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10795879A JPS5632134A (en) | 1979-08-24 | 1979-08-24 | Vacuum contact printing method |
| US06/179,517 US4360266A (en) | 1979-08-24 | 1980-08-19 | Contact printing method and apparatus |
| DE19803031415 DE3031415A1 (en) | 1979-08-24 | 1980-08-20 | METHOD AND DEVICE FOR PRODUCING CONTACT. |
| IT49540/80A IT1127542B (en) | 1979-08-24 | 1980-08-22 | CONTACT PRINTING METHOD AND EQUIPMENT |
| GB8027342A GB2057152B (en) | 1979-08-24 | 1980-08-22 | Contact printing |
| FR8018373A FR2463945B1 (en) | 1979-08-24 | 1980-08-22 | PHOTOCOPYING METHOD AND APPARATUS USING THE VACUUM TO HOLD THE ORIGINAL AND SENSITIVE MATERIAL IN INTIMATE CONTACT DURING EXPOSURE |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10795879A JPS5632134A (en) | 1979-08-24 | 1979-08-24 | Vacuum contact printing method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12864479A Division JPS5632145A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5632134A true JPS5632134A (en) | 1981-04-01 |
| JPS6310826B2 JPS6310826B2 (en) | 1988-03-09 |
Family
ID=14472365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10795879A Granted JPS5632134A (en) | 1979-08-24 | 1979-08-24 | Vacuum contact printing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5632134A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118438A (en) * | 1982-01-06 | 1983-07-14 | Aisin Seiki Co Ltd | Controller of pedal parking brake |
| JPS58206454A (en) * | 1982-05-22 | 1983-12-01 | Aisin Seiki Co Ltd | Brake power holding apparatus for vehicle |
| JPS5923755A (en) * | 1982-07-31 | 1984-02-07 | Aisin Seiki Co Ltd | Control device for hand lever type parking brake |
| JPS63106161A (en) * | 1986-05-17 | 1988-05-11 | Nhk Spring Co Ltd | Foot-operated parking brake |
| JPS63306957A (en) * | 1987-06-08 | 1988-12-14 | Nhk Spring Co Ltd | Pedal type parking brake |
-
1979
- 1979-08-24 JP JP10795879A patent/JPS5632134A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118438A (en) * | 1982-01-06 | 1983-07-14 | Aisin Seiki Co Ltd | Controller of pedal parking brake |
| JPS58206454A (en) * | 1982-05-22 | 1983-12-01 | Aisin Seiki Co Ltd | Brake power holding apparatus for vehicle |
| JPS5923755A (en) * | 1982-07-31 | 1984-02-07 | Aisin Seiki Co Ltd | Control device for hand lever type parking brake |
| JPS63106161A (en) * | 1986-05-17 | 1988-05-11 | Nhk Spring Co Ltd | Foot-operated parking brake |
| JPS63306957A (en) * | 1987-06-08 | 1988-12-14 | Nhk Spring Co Ltd | Pedal type parking brake |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310826B2 (en) | 1988-03-09 |
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