JPS5640235A - Semiconductor substrate loading boat push-in-and-pull-out device - Google Patents

Semiconductor substrate loading boat push-in-and-pull-out device

Info

Publication number
JPS5640235A
JPS5640235A JP11518079A JP11518079A JPS5640235A JP S5640235 A JPS5640235 A JP S5640235A JP 11518079 A JP11518079 A JP 11518079A JP 11518079 A JP11518079 A JP 11518079A JP S5640235 A JPS5640235 A JP S5640235A
Authority
JP
Japan
Prior art keywords
boat
magnet
pull
preparing chamber
outside air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11518079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159655B2 (2
Inventor
Shigeru Takeda
Kazuo Kamiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP11518079A priority Critical patent/JPS5640235A/ja
Publication of JPS5640235A publication Critical patent/JPS5640235A/ja
Publication of JPS6159655B2 publication Critical patent/JPS6159655B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3311—Horizontal transfer of a batch of workpieces
JP11518079A 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device Granted JPS5640235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11518079A JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11518079A JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Publications (2)

Publication Number Publication Date
JPS5640235A true JPS5640235A (en) 1981-04-16
JPS6159655B2 JPS6159655B2 (2) 1986-12-17

Family

ID=14656324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11518079A Granted JPS5640235A (en) 1979-09-10 1979-09-10 Semiconductor substrate loading boat push-in-and-pull-out device

Country Status (1)

Country Link
JP (1) JPS5640235A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254166U (2) * 1985-09-25 1987-04-03
JPS63282272A (ja) * 1987-05-12 1988-11-18 Teru Sagami Kk サセプタの駆動装置
JP2013182685A (ja) * 2012-02-29 2013-09-12 Toshiba Corp レーザイオン源

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254166U (2) * 1985-09-25 1987-04-03
JPS63282272A (ja) * 1987-05-12 1988-11-18 Teru Sagami Kk サセプタの駆動装置
JP2013182685A (ja) * 2012-02-29 2013-09-12 Toshiba Corp レーザイオン源
US9251991B2 (en) 2012-02-29 2016-02-02 Kabushiki Kaisha Toshiba Laser ion source

Also Published As

Publication number Publication date
JPS6159655B2 (2) 1986-12-17

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