JPS5641101B2 - - Google Patents

Info

Publication number
JPS5641101B2
JPS5641101B2 JP4022574A JP4022574A JPS5641101B2 JP S5641101 B2 JPS5641101 B2 JP S5641101B2 JP 4022574 A JP4022574 A JP 4022574A JP 4022574 A JP4022574 A JP 4022574A JP S5641101 B2 JPS5641101 B2 JP S5641101B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4022574A
Other languages
Japanese (ja)
Other versions
JPS50133008A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4022574A priority Critical patent/JPS5641101B2/ja
Priority to DE19752515375 priority patent/DE2515375A1/de
Publication of JPS50133008A publication Critical patent/JPS50133008A/ja
Publication of JPS5641101B2 publication Critical patent/JPS5641101B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/092—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by backside coating or layers, by lubricating-slip layers or means, by oxygen barrier layers or by stripping-release layers or means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/38—Treatment before imagewise removal, e.g. prebaking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP4022574A 1974-04-09 1974-04-09 Expired JPS5641101B2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4022574A JPS5641101B2 (fr) 1974-04-09 1974-04-09
DE19752515375 DE2515375A1 (de) 1974-04-09 1975-04-09 Verfahren zur erzeugung von bildern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4022574A JPS5641101B2 (fr) 1974-04-09 1974-04-09

Publications (2)

Publication Number Publication Date
JPS50133008A JPS50133008A (fr) 1975-10-21
JPS5641101B2 true JPS5641101B2 (fr) 1981-09-25

Family

ID=12574805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4022574A Expired JPS5641101B2 (fr) 1974-04-09 1974-04-09

Country Status (2)

Country Link
JP (1) JPS5641101B2 (fr)
DE (1) DE2515375A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54135005A (en) * 1978-04-12 1979-10-19 Koyo Kagaku Kougiyou Kk Method of photoengraving
DE69130184T2 (de) * 1990-02-23 1999-02-11 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa Verfahren zur Herstellung mehrschichtiger Beschichtungen

Also Published As

Publication number Publication date
JPS50133008A (fr) 1975-10-21
DE2515375A1 (de) 1975-10-23

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