JPS5642342A - Facing device of wafer - Google Patents

Facing device of wafer

Info

Publication number
JPS5642342A
JPS5642342A JP11860879A JP11860879A JPS5642342A JP S5642342 A JPS5642342 A JP S5642342A JP 11860879 A JP11860879 A JP 11860879A JP 11860879 A JP11860879 A JP 11860879A JP S5642342 A JPS5642342 A JP S5642342A
Authority
JP
Japan
Prior art keywords
light
cutting
wafer
wafers
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11860879A
Other languages
Japanese (ja)
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11860879A priority Critical patent/JPS5642342A/en
Publication of JPS5642342A publication Critical patent/JPS5642342A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To set the direction of wafers so that they are facing exactly by a method wherein a cutting off of a straight line is provided in the periphery of wafer, a plate that a hole is made on the straight line around the cutting off portion is arranged, the light is illuminated thereupon and the passing light through the holes on the plate is detected. CONSTITUTION:The wafer 5 having the straight line cutting off portion K is placed on a rotary base 1, and the center of both the wafer are the base made coincided, when the base 1 is turned by a motor 3, the cutting off portion K is crossed at a right angle with the center line O, the same quantity of light from a light source 8 enters to the detector 9a and 9b passing through holes 6a, 6b in the fixed base 7. The quantity of light is compared 10, and the motor 3 is stopped to set the wafers at desired positions. When the cutting off portion is staggered, since the light is interrupted or the detected quantity of light is different, the motor will not be stopped. In this constitution, wafers can be set in a required directions accurately.
JP11860879A 1979-09-14 1979-09-14 Facing device of wafer Pending JPS5642342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11860879A JPS5642342A (en) 1979-09-14 1979-09-14 Facing device of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11860879A JPS5642342A (en) 1979-09-14 1979-09-14 Facing device of wafer

Publications (1)

Publication Number Publication Date
JPS5642342A true JPS5642342A (en) 1981-04-20

Family

ID=14740762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11860879A Pending JPS5642342A (en) 1979-09-14 1979-09-14 Facing device of wafer

Country Status (1)

Country Link
JP (1) JPS5642342A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818713A (en) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> Positioning device for discoid object

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (en) * 1973-03-07 1974-11-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818713A (en) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> Positioning device for discoid object

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