JPS5643502A - Eddy current system electric displacement meter - Google Patents

Eddy current system electric displacement meter

Info

Publication number
JPS5643502A
JPS5643502A JP11913679A JP11913679A JPS5643502A JP S5643502 A JPS5643502 A JP S5643502A JP 11913679 A JP11913679 A JP 11913679A JP 11913679 A JP11913679 A JP 11913679A JP S5643502 A JPS5643502 A JP S5643502A
Authority
JP
Japan
Prior art keywords
temperature change
outputs
bridge circuit
eddy current
current system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11913679A
Other languages
Japanese (ja)
Other versions
JPS6125281B2 (en
Inventor
Takashi Endo
Takeo Kamimura
Yasuo Araki
Tomofumi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP11913679A priority Critical patent/JPS5643502A/en
Publication of JPS5643502A publication Critical patent/JPS5643502A/en
Publication of JPS6125281B2 publication Critical patent/JPS6125281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To make it possible to perform the measurement with high precision which does not contain an error based upon temperature change, by applying outputs of the electric power supplies whose frequencies are relatively high and also relatively low, to the bridge circuit of the eddy current system electric displacement meter.
CONSTITUTION: The bridge circuit 22 containing a sensor coil 1 for detecting a variation of the gap (g) to a measuring sample W is used for high frequency of 1MHz, and the bridge circuit 22L is used, for instance, for low frequency of 25kHz. The outputs of the electric power supplies 21, 21L for both high frequency and low frequency are provided to the bridge circuits 22, 22L through the adder 27, and the difference of both the outputs is detected by the differential amplifier 28 through the tuning amplifiers 23, 23L, the phase shifters 25, 25L for giving a reference signal, the phase detectors 24, 24L, and the DC amplifiers 26, 26L. In this case, since an error signal based upon temperature change of the sensor coil 1 is removed, the measurement with high precision which does not contain an error based upon temperature change can be performed.
COPYRIGHT: (C)1981,JPO&Japio
JP11913679A 1979-09-17 1979-09-17 Eddy current system electric displacement meter Granted JPS5643502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11913679A JPS5643502A (en) 1979-09-17 1979-09-17 Eddy current system electric displacement meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11913679A JPS5643502A (en) 1979-09-17 1979-09-17 Eddy current system electric displacement meter

Publications (2)

Publication Number Publication Date
JPS5643502A true JPS5643502A (en) 1981-04-22
JPS6125281B2 JPS6125281B2 (en) 1986-06-14

Family

ID=14753821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11913679A Granted JPS5643502A (en) 1979-09-17 1979-09-17 Eddy current system electric displacement meter

Country Status (1)

Country Link
JP (1) JPS5643502A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469901A (en) * 1987-09-11 1989-03-15 Nikon Corp Interval measuring apparatus
JP2005221282A (en) * 2004-02-04 2005-08-18 Jfe Steel Kk Layer thickness measurement method, system, and program for layer thickness measurement method
FR2875597A1 (en) * 2004-09-22 2006-03-24 Bosch Gmbh Robert Eddy current position sensor operating method for e.g. ABS type electro-hydraulic braking system, involves applying alternating voltages of different frequencies to sensor`s field coil, and determining inductance of coil at each frequency

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455178U (en) * 1987-10-01 1989-04-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469901A (en) * 1987-09-11 1989-03-15 Nikon Corp Interval measuring apparatus
JP2005221282A (en) * 2004-02-04 2005-08-18 Jfe Steel Kk Layer thickness measurement method, system, and program for layer thickness measurement method
FR2875597A1 (en) * 2004-09-22 2006-03-24 Bosch Gmbh Robert Eddy current position sensor operating method for e.g. ABS type electro-hydraulic braking system, involves applying alternating voltages of different frequencies to sensor`s field coil, and determining inductance of coil at each frequency

Also Published As

Publication number Publication date
JPS6125281B2 (en) 1986-06-14

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