JPS5643992A - Washing device - Google Patents
Washing deviceInfo
- Publication number
- JPS5643992A JPS5643992A JP11968979A JP11968979A JPS5643992A JP S5643992 A JPS5643992 A JP S5643992A JP 11968979 A JP11968979 A JP 11968979A JP 11968979 A JP11968979 A JP 11968979A JP S5643992 A JPS5643992 A JP S5643992A
- Authority
- JP
- Japan
- Prior art keywords
- washing device
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11968979A JPS5946633B2 (en) | 1979-09-17 | 1979-09-17 | washing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11968979A JPS5946633B2 (en) | 1979-09-17 | 1979-09-17 | washing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5643992A true JPS5643992A (en) | 1981-04-22 |
| JPS5946633B2 JPS5946633B2 (en) | 1984-11-14 |
Family
ID=14767610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11968979A Expired JPS5946633B2 (en) | 1979-09-17 | 1979-09-17 | washing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5946633B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948047U (en) * | 1983-08-18 | 1984-03-30 | 富士通株式会社 | semiconductor equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6352928A (en) * | 1986-08-20 | 1988-03-07 | Toshiba Ceramics Co Ltd | Electro-discharge processing device |
-
1979
- 1979-09-17 JP JP11968979A patent/JPS5946633B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948047U (en) * | 1983-08-18 | 1984-03-30 | 富士通株式会社 | semiconductor equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5946633B2 (en) | 1984-11-14 |
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