JPS5644801A - Positioning system - Google Patents

Positioning system

Info

Publication number
JPS5644801A
JPS5644801A JP12061279A JP12061279A JPS5644801A JP S5644801 A JPS5644801 A JP S5644801A JP 12061279 A JP12061279 A JP 12061279A JP 12061279 A JP12061279 A JP 12061279A JP S5644801 A JPS5644801 A JP S5644801A
Authority
JP
Japan
Prior art keywords
detection light
lens
light source
focusing
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12061279A
Other languages
Japanese (ja)
Inventor
Yuichi Murakami
Akira Ono
Kenji Ushimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12061279A priority Critical patent/JPS5644801A/en
Publication of JPS5644801A publication Critical patent/JPS5644801A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Abstract

PURPOSE: To reduce the error due to movement by a method wherein the mobile irradiation optical system focusing the detection light is connected to the light source by means of photo-fiber.
CONSTITUTION: Detection light 21 from detection lase oscillator 11 on detection light source system 13 passes through focusing lens 42 and forms a focus on end face 48a of leading in terminal 48 of photo-fiber 27. Detection light 21 passes through semicylindrical lens 56, focusing irradiation lens 55 and forms the image of the light source on end face 49, at a position distant twice the focal length of lens 55. When table 14 is lifted by pulse motor 38 and detection light 21 reaches specified position 4 of grid 2a, control circuit 72 stops the pulse motor and brings table 14 to the specified position.
COPYRIGHT: (C)1981,JPO&Japio
JP12061279A 1979-09-21 1979-09-21 Positioning system Pending JPS5644801A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12061279A JPS5644801A (en) 1979-09-21 1979-09-21 Positioning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12061279A JPS5644801A (en) 1979-09-21 1979-09-21 Positioning system

Publications (1)

Publication Number Publication Date
JPS5644801A true JPS5644801A (en) 1981-04-24

Family

ID=14790547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12061279A Pending JPS5644801A (en) 1979-09-21 1979-09-21 Positioning system

Country Status (1)

Country Link
JP (1) JPS5644801A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62297108A (en) * 1986-05-30 1987-12-24 ゼネラル　シグナル　コ−ポレ−シヨン Manufacture of heat-insulating block and heat-insulating block and electric heater
JPS63120059A (en) * 1986-10-17 1988-05-24 スパータニクス・エル・ティ・ディ Material aligner
CN114502312A (en) * 2021-03-04 2022-05-13 国立大学法人名古屋工业大学 Laser processing apparatus and relation determination method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62297108A (en) * 1986-05-30 1987-12-24 ゼネラル　シグナル　コ−ポレ−シヨン Manufacture of heat-insulating block and heat-insulating block and electric heater
JPS63120059A (en) * 1986-10-17 1988-05-24 スパータニクス・エル・ティ・ディ Material aligner
CN114502312A (en) * 2021-03-04 2022-05-13 国立大学法人名古屋工业大学 Laser processing apparatus and relation determination method
JP7144110B1 (en) * 2021-03-04 2022-09-29 国立大学法人 名古屋工業大学 Laser processing device and relationship determination method

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