JPS5648546A - Crack detector - Google Patents

Crack detector

Info

Publication number
JPS5648546A
JPS5648546A JP12663379A JP12663379A JPS5648546A JP S5648546 A JPS5648546 A JP S5648546A JP 12663379 A JP12663379 A JP 12663379A JP 12663379 A JP12663379 A JP 12663379A JP S5648546 A JPS5648546 A JP S5648546A
Authority
JP
Japan
Prior art keywords
chip
crack
mirror
detected
photoelectric transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12663379A
Other languages
Japanese (ja)
Inventor
Yoshinobu Kashiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12663379A priority Critical patent/JPS5648546A/en
Publication of JPS5648546A publication Critical patent/JPS5648546A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To ensure a high-accuracy detection for the crack, by using a simple optical system plus two photodetector means. CONSTITUTION:A slit-like projection is given by a projector and from the side surface of the throwaway chip 1. In other words, the light 2 emitted from the light source is condensed into a slit formation and in the longitudinal direction of the center side surface of the chip 1 through the cylindrical lens 3. The half-mirror 4 is provided between the lens 3 and the chip 1, and thus the reflected light enters the 1st photoelectric transducer 5 provided at the side area of the optical path by the mirror 4. On the other hand, the 2nd photoelectric transducer 6 is provided at the upper part of the side end of the chip 1. Thus the crack, if detected at the end area of the side, can be detected with occurrence of the diffused reflection.
JP12663379A 1979-09-28 1979-09-28 Crack detector Pending JPS5648546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12663379A JPS5648546A (en) 1979-09-28 1979-09-28 Crack detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12663379A JPS5648546A (en) 1979-09-28 1979-09-28 Crack detector

Publications (1)

Publication Number Publication Date
JPS5648546A true JPS5648546A (en) 1981-05-01

Family

ID=14940017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12663379A Pending JPS5648546A (en) 1979-09-28 1979-09-28 Crack detector

Country Status (1)

Country Link
JP (1) JPS5648546A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120211A3 (en) * 1983-03-02 1986-11-20 CARBOLOY S.p.A. Method and apparatus for the dimension inspection of solid bodies
JPS61271405A (en) * 1985-05-27 1986-12-01 Mitsubishi Metal Corp Flatness of corner part inspecting apparatus
JPS6316252A (en) * 1986-06-02 1988-01-23 Inax Corp Automatic inspecting method for chipping of surface of side part

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120211A3 (en) * 1983-03-02 1986-11-20 CARBOLOY S.p.A. Method and apparatus for the dimension inspection of solid bodies
JPS61271405A (en) * 1985-05-27 1986-12-01 Mitsubishi Metal Corp Flatness of corner part inspecting apparatus
JPS6316252A (en) * 1986-06-02 1988-01-23 Inax Corp Automatic inspecting method for chipping of surface of side part

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