JPS5650110A - Manufacture of finely powdered silicic acid of larger particle size - Google Patents

Manufacture of finely powdered silicic acid of larger particle size

Info

Publication number
JPS5650110A
JPS5650110A JP12472479A JP12472479A JPS5650110A JP S5650110 A JPS5650110 A JP S5650110A JP 12472479 A JP12472479 A JP 12472479A JP 12472479 A JP12472479 A JP 12472479A JP S5650110 A JPS5650110 A JP S5650110A
Authority
JP
Japan
Prior art keywords
particle size
soln
finely powdered
powdered silicic
silicic acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12472479A
Other languages
Japanese (ja)
Other versions
JPS6116732B2 (en
Inventor
Masakazu Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP12472479A priority Critical patent/JPS5650110A/en
Publication of JPS5650110A publication Critical patent/JPS5650110A/en
Publication of JPS6116732B2 publication Critical patent/JPS6116732B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE: To manufacture finely powdered silicic acid of larger particle size useful mainly for polishing a semiconductor substrate by adding an acidic substance to an aqueous alkali silicate soln. contg. finely powdered silicic aicd as seed.
CONSTITUTION: To an aqeuous soln. contg. 0.5W1.0mol/l sodium silicate as Na2O concn. is added commercially-available finely-powdered silicic acid by 0.3W 1mol per 3l of the soln., and 0.5W2N hydrochloric acid, sulfuric acid, carbonic acid or the like is added at 0.2W1.0l/min per 3l of the aqueous sodium silicic soln. while keeping ≥70, especially 90W95°C constant temp. The resulting finely powdered silicic acid of larger particle size has 30W0.6m2/g specific surface area (0.1W5μ particle size), and it is mainly used to polish a semiconductor wafer after drying.
COPYRIGHT: (C)1981,JPO&Japio
JP12472479A 1979-09-29 1979-09-29 Manufacture of finely powdered silicic acid of larger particle size Granted JPS5650110A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12472479A JPS5650110A (en) 1979-09-29 1979-09-29 Manufacture of finely powdered silicic acid of larger particle size

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12472479A JPS5650110A (en) 1979-09-29 1979-09-29 Manufacture of finely powdered silicic acid of larger particle size

Publications (2)

Publication Number Publication Date
JPS5650110A true JPS5650110A (en) 1981-05-07
JPS6116732B2 JPS6116732B2 (en) 1986-05-01

Family

ID=14892529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12472479A Granted JPS5650110A (en) 1979-09-29 1979-09-29 Manufacture of finely powdered silicic acid of larger particle size

Country Status (1)

Country Link
JP (1) JPS5650110A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111342U (en) * 1982-01-22 1983-07-29 本田技研工業株式会社 carburetor adjustment screw

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111342U (en) * 1982-01-22 1983-07-29 本田技研工業株式会社 carburetor adjustment screw

Also Published As

Publication number Publication date
JPS6116732B2 (en) 1986-05-01

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