JPS56501381A - - Google Patents
Info
- Publication number
- JPS56501381A JPS56501381A JP50002679A JP50002679A JPS56501381A JP S56501381 A JPS56501381 A JP S56501381A JP 50002679 A JP50002679 A JP 50002679A JP 50002679 A JP50002679 A JP 50002679A JP S56501381 A JPS56501381 A JP S56501381A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/SU1979/000098 WO1981001228A1 (fr) | 1979-10-18 | 1979-10-18 | Dispositif d'exploration d'un rayon de particules chargees |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56501381A true JPS56501381A (de) | 1981-09-24 |
Family
ID=21616563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50002679A Pending JPS56501381A (de) | 1979-10-18 | 1979-10-18 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS56501381A (de) |
| CH (1) | CH652553A5 (de) |
| DE (1) | DE2953877C2 (de) |
| WO (1) | WO1981001228A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH078300B2 (ja) * | 1988-06-21 | 1995-02-01 | 三菱電機株式会社 | 荷電粒子ビームの照射装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2961561A (en) * | 1957-10-29 | 1960-11-22 | Gen Electric | Internal magnetic deflection system for electron beam generator |
| FR1251686A (fr) * | 1960-03-18 | 1961-01-20 | Thomson Houston Comp Francaise | Appareil de balayage asynchrone de faisceau électronique |
-
1979
- 1979-10-18 JP JP50002679A patent/JPS56501381A/ja active Pending
- 1979-10-18 CH CH390281A patent/CH652553A5/de not_active IP Right Cessation
- 1979-10-18 WO PCT/SU1979/000098 patent/WO1981001228A1/ru not_active Ceased
- 1979-10-18 DE DE2953877A patent/DE2953877C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2953877A1 (en) | 1982-03-25 |
| DE2953877C2 (de) | 1985-01-03 |
| CH652553A5 (en) | 1985-11-15 |
| WO1981001228A1 (fr) | 1981-04-30 |