JPS5651218U - - Google Patents
Info
- Publication number
- JPS5651218U JPS5651218U JP13323179U JP13323179U JPS5651218U JP S5651218 U JPS5651218 U JP S5651218U JP 13323179 U JP13323179 U JP 13323179U JP 13323179 U JP13323179 U JP 13323179U JP S5651218 U JPS5651218 U JP S5651218U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13323179U JPS5651218U (de) | 1979-09-28 | 1979-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13323179U JPS5651218U (de) | 1979-09-28 | 1979-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5651218U true JPS5651218U (de) | 1981-05-07 |
Family
ID=29364823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13323179U Pending JPS5651218U (de) | 1979-09-28 | 1979-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5651218U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254078A (ja) * | 1985-06-12 | 1987-03-09 | レイボルド アクティエンゲゼルシャフト | 陰極スパツタリング処理により基板に薄層を被着する装置 |
| JPS63471A (ja) * | 1986-06-20 | 1988-01-05 | Matsushita Electric Ind Co Ltd | 透明導電膜の形成方法 |
| JPH01242769A (ja) * | 1988-03-24 | 1989-09-27 | Asahi Glass Co Ltd | 透明導電膜の製造方法、ターゲット材料及びタブレット材料 |
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1979
- 1979-09-28 JP JP13323179U patent/JPS5651218U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254078A (ja) * | 1985-06-12 | 1987-03-09 | レイボルド アクティエンゲゼルシャフト | 陰極スパツタリング処理により基板に薄層を被着する装置 |
| JPS63471A (ja) * | 1986-06-20 | 1988-01-05 | Matsushita Electric Ind Co Ltd | 透明導電膜の形成方法 |
| JPH01242769A (ja) * | 1988-03-24 | 1989-09-27 | Asahi Glass Co Ltd | 透明導電膜の製造方法、ターゲット材料及びタブレット材料 |