JPS5654797A - Ion source device - Google Patents
Ion source deviceInfo
- Publication number
- JPS5654797A JPS5654797A JP13044479A JP13044479A JPS5654797A JP S5654797 A JPS5654797 A JP S5654797A JP 13044479 A JP13044479 A JP 13044479A JP 13044479 A JP13044479 A JP 13044479A JP S5654797 A JPS5654797 A JP S5654797A
- Authority
- JP
- Japan
- Prior art keywords
- source device
- ion source
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13044479A JPS5654797A (en) | 1979-10-09 | 1979-10-09 | Ion source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13044479A JPS5654797A (en) | 1979-10-09 | 1979-10-09 | Ion source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5654797A true JPS5654797A (en) | 1981-05-14 |
Family
ID=15034383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13044479A Pending JPS5654797A (en) | 1979-10-09 | 1979-10-09 | Ion source device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5654797A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4767931A (en) * | 1986-12-17 | 1988-08-30 | Hitachi, Ltd. | Ion beam apparatus |
-
1979
- 1979-10-09 JP JP13044479A patent/JPS5654797A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4767931A (en) * | 1986-12-17 | 1988-08-30 | Hitachi, Ltd. | Ion beam apparatus |
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