JPS5658242A - Manufacture of semiconductor integrated circuit - Google Patents
Manufacture of semiconductor integrated circuitInfo
- Publication number
- JPS5658242A JPS5658242A JP13384979A JP13384979A JPS5658242A JP S5658242 A JPS5658242 A JP S5658242A JP 13384979 A JP13384979 A JP 13384979A JP 13384979 A JP13384979 A JP 13384979A JP S5658242 A JPS5658242 A JP S5658242A
- Authority
- JP
- Japan
- Prior art keywords
- isolation
- perfect
- chip
- element isolation
- imperfect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To exclude an imperfect isolation and to improve the yield by a method wherein an element isolation region around a diffusion monitor is formed in the state that the minimum width of the element isolation region contains within an IC chip is at least partially included, and the element isolation is inspected between monitors. CONSTITUTION:The thickness of the diffusion layer depends upon the surface width, when the width is narrow it will be shallow even in a same condition. Although it is judged the isolation is perfect in the broad element isolation region, the case imperfect operation will occur in the IC. Then, the isolation region is provided in the same size as the minimum element separation region in the IC chip 10 at both side of a scribe line 12, the possibility of the isolation is detected between diffusion monitors 11, 11' by a probe. If the isolation is perfect it may be regarded as the isolation in the chip is also perfect. Thus the imperfect element isolation is entirely excluded, the reliability is enhanced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13384979A JPS5658242A (en) | 1979-10-17 | 1979-10-17 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13384979A JPS5658242A (en) | 1979-10-17 | 1979-10-17 | Manufacture of semiconductor integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5658242A true JPS5658242A (en) | 1981-05-21 |
Family
ID=15114462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13384979A Pending JPS5658242A (en) | 1979-10-17 | 1979-10-17 | Manufacture of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5658242A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430548A (en) * | 1990-05-28 | 1992-02-03 | Fujitsu Ltd | Semiconductor device, and test method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142479A (en) * | 1974-10-08 | 1976-04-10 | Nippon Electric Co | |
| JPS52101979A (en) * | 1976-02-23 | 1977-08-26 | Agency Of Ind Science & Technol | Semiconductor device |
-
1979
- 1979-10-17 JP JP13384979A patent/JPS5658242A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142479A (en) * | 1974-10-08 | 1976-04-10 | Nippon Electric Co | |
| JPS52101979A (en) * | 1976-02-23 | 1977-08-26 | Agency Of Ind Science & Technol | Semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430548A (en) * | 1990-05-28 | 1992-02-03 | Fujitsu Ltd | Semiconductor device, and test method |
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